On-chip sensor solution for hydrogen gas detection with the anodic niobium-oxide nanorod arrays

[Display omitted] •Novel niobium oxide nanorod arrays are synthesized via anodizing.•Nanorods are integrated as active layer in on-chip microsensors.•Advanced sensor-on-chip design is realized through technological innovations.•New sensors provide fast, sensitive and selective H2 detection. Two type...

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Bibliographic Details
Published in:	Sensors and actuators. B, Chemical Vol. 284; pp. 723 - 735
Main Authors:	Pytlicek, Zdenek, Bendova, Maria, Prasek, Jan, Mozalev, Alexander
Format:	Journal Article
Language:	English
Published:	Lausanne Elsevier B.V 01-04-2019 Elsevier Science Ltd
Subjects:	Aluminum Ammonia Anodic alumina Anodizing Bilayers Chemical etching Density Detection Electric wire Gas sensors High temperature Hydrogen Interlayers Metal oxides Multilayers Nanomaterials Nanorods Niobium oxide nanorods Niobium oxides On-chip sensor Organic chemistry Photolithography Schottky barrier Sensor arrays Silicon dioxide PAA Anodic alumina Anodizing Hydrogen Niobium oxide nanorods On-chip sensor Schottky barrier
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