Organic vapor sensors based on functionalized macroporous Si using single and double-side electrochemical etching

Organic sensors for ethanol vapor detection were developed by means of electrochemical etching of crystalline silicon as initial substrate following two procedures: front side etching (FSE) and front- and backside (“double”) surface etching (DSE). The first consists on the attack of the crystalline...

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Bibliographic Details
Published in:	Microelectronic engineering Vol. 90; no. Feb; pp. 55 - 58
Main Authors:	Ramírez-Porras, A., Fahlman, B.D., Badilla, J.P., López, V.
Format:	Journal Article Conference Proceeding
Language:	English
Published:	Amsterdam Elsevier B.V 01-02-2012 Elsevier
Subjects:	Applied sciences Brazing. Soldering Cross-disciplinary physics: materials science; rheology Crystal structure Electrochemical etching Etching Ethanol Ethyl alcohol Exact sciences and technology Functionalization General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Joining, thermal cutting: metallurgical aspects Materials science Metals. Metallurgy Physics Porous materials; granular materials Porous silicon Sensors Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing Silicon Silicon substrates Specific materials Surface treatments Functionalization Porous silicon Sensors Ethanol Porous materials Measurement sensor Thickness Crystalline material Solder Integrated circuit bonding Back surface Pore size Chemical modification Response time Reproducibility Wafers Hydrofluoric acid Free-standing film Silicon Soldered joints Electrochemical etching
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