Direct laser writing of Fresnel microlenses with use of the scanning contour ablation method

Modern technological trends require the miniaturization of various devices, and hence the fabrication of micro-scale optical elements. Despite the existence of photolithography methods, which are commonly used for this purpose, there is still a need for developing fast prototyping solutions. In fact...

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Bibliographic Details
Published in:	International journal of advanced manufacturing technology Vol. 78; no. 9-12; pp. 1549 - 1556
Main Authors:	Wójcik, Michał R., Antończak, Arkadiusz J., Stępak, Bogusz D., Kozioł, Paweł E., Łazarek, Łukasz K., Abramski, Krzysztof M.
Format:	Journal Article
Language:	English
Published:	London Springer London 01-06-2015 Springer Nature B.V
Subjects:	CAE) and Design Computer-Aided Engineering (CAD Contours Direct laser writing Engineering Industrial and Production Engineering Laser ablation Mechanical Engineering Media Management Microlenses Microscopes Miniaturization Optical components Optical microscopy Original Article Photolithography Prototyping Scanning Shape Microlenses Fresnel microlenses Scanning contour ablation Excimer laser ablation Micromachining Laser micromachining
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