Tunable Sensor Response by Voltage-Control in Biomimetic Hair Flow Sensors

• Published in: Micromachines (Basel) Vol. 4; no. 1; pp. 116 - 127
• Main Authors: Droogendijk, Harmen, Bruinink, Christiaan, Sanders, Remco, Krijnen, Gijs
• Format: Journal Article
• Language: English
• Published: Basel MDPI AG 01-03-2013
• Subjects: biomimetics; cricket; electrostatic spring softening; flow sensor; hair
• ISSN: 2072-666X; 2072-666X
• DOI: 10.3390/mi4010116

We presented an overview of improvements in detection limit and responsivity of our biomimetic hair flow sensors by electrostatic spring-softening (ESS). Applying a DC-bias voltage to our capacitive flow sensors improves the responsively by up to 80% for flow signals at frequencies below the sensor’s resonance. Application of frequency matched AC-bias voltages allows for tunable filtering and selective gain up to 20 dB. Furthermore, the quality and fidelity of low frequency flow measurements can be improved using a non frequency-matched AC-bias voltage, resulting in a flow detection limit down to 5 mm/s at low (30 Hz) frequencies. The merits and applicability of the three methods are discussed.