Preparation of rare earth CeO2 thin films using metal organic decomposition method for metal-oxide–semiconductor capacitors

Investigation of metal organic decomposed rare earth cerium oxide thin films deposited on Si substrate by sol–gel spin coating technique was carried out. The structural properties have been examined by using XRD, Fourier transform infrared spectroscopy (FTIR), field emission scanning electron micros...

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Bibliographic Details
Published in:	Journal of materials science. Materials in electronics Vol. 28; no. 17; pp. 12503 - 12508
Main Authors:	Agrawal, Khushabu S., Patil, Vilas S., Khairnar, Anil G., Mahajan, Ashok M.
Format:	Journal Article
Language:	English
Published:	New York Springer US 01-09-2017 Springer Nature B.V
Subjects:	Atomic force microscopy Beryllium Capacitors Cerium oxides Characterization and Evaluation of Materials Chemistry and Materials Science Cross-sections Decomposition Electric contacts Electrical measurement Electron beams Electron spin Emission spectroscopy Evaporation Field emission microscopy Fourier transforms Gold Infrared spectroscopy Materials Science Metal oxide semiconductors Optical and Electronic Materials Rare earth compounds Resistance Scanning electron microscopy Silicon substrates Sol-gel processes Spectrum analysis Spin coating Thin films Work Function CeO2 Complementary Metal Oxide Semiconductor Leakage Current Density Flat Band Voltage
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