Control of defect-mediated tunneling barrier heights in ultrathin MgO films
The impact of oxygen vacancies on local tunneling properties across rf-sputtered MgO thin films was investigated by optical absorption spectroscopy and conducting atomic force microscopy. Adding O 2 to the Ar plasma during MgO growth alters the oxygen defect populations, leading to improved local tu...
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Published in: | Applied physics letters Vol. 97; no. 26; pp. 263502 - 263502-3 |
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Main Authors: | , , , , , , , , , , , |
Format: | Journal Article |
Language: | English |
Published: |
American Institute of Physics
27-12-2010
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Online Access: | Get full text |
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Summary: | The impact of oxygen vacancies on local tunneling properties across rf-sputtered MgO thin films was investigated by optical absorption spectroscopy and conducting atomic force microscopy. Adding
O
2
to the Ar plasma during MgO growth alters the oxygen defect populations, leading to improved local tunneling characteristics such as a lower density of current hotspots and a lower tunnel current amplitude. We discuss a defect-based potential landscape across ultrathin MgO barriers. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.3531652 |