Atomic force probe for sidewall scanning of nano- and microstructures

An atomic force microscope (AFM) probe applicable for sidewall scanning has been developed. In its configuration, a horizontal AFM cantilever is microassembled with a vertical AFM cantilever. An AFM tip located at the free end of the vertical cantilever and extending horizontally is capable of probi...

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Bibliographic Details

Published in:	Applied physics letters Vol. 88; no. 17; pp. 171908 - 171908-3
Main Authors:	Dai, Gaoliang, Wolff, Helmut, Pohlenz, Frank, Danzebrink, Hans-Ulrich, Wilkening, Günter
Format:	Journal Article
Language:	English
Published:	American Institute of Physics 24-04-2006
Online Access:	Get full text
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