Preparation of high-quality hexaferrite thick films by an improved liquid phase epitaxy deposition technique
In this paper, we report on the deposition of thick and high-quality films of BaM on (111) gadolinium gallium garnet (GGG) and m-plane, (11_00) or (101_0), sapphire (Al/sub 2/O/sub 3/) substrates. The deposition rate is sufficiently high to allow for large batch production. The total thickness range...
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Published in: | IEEE transactions on magnetics Vol. 39; no. 5; pp. 3163 - 3165 |
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Main Authors: | , |
Format: | Journal Article Conference Proceeding |
Language: | English |
Published: |
New York, NY
IEEE
01-09-2003
Institute of Electrical and Electronics Engineers The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subjects: | |
Online Access: | Get full text |
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Summary: | In this paper, we report on the deposition of thick and high-quality films of BaM on (111) gadolinium gallium garnet (GGG) and m-plane, (11_00) or (101_0), sapphire (Al/sub 2/O/sub 3/) substrates. The deposition rate is sufficiently high to allow for large batch production. The total thickness ranged from 50 to 200 /spl mu/m for 2 h of the liquid phase epitaxy deposition. Therefore, the growth rate of the films ranged from /spl sim/25 to /spl sim/100 /spl mu/m/h. In previous work, growth rates in BaM films were quite small. Equally important, the ferrimagnetic resonance (FMR) linewidth (/spl Delta/H) was /spl sim/0.068 kOe at 58 GHz for the BaM films on (111) GGG and /spl sim/0.08 kOe at 59.9 GHz for the BaM film on m-plane sapphire substrates. The FMR linewidth films of thick BaM films deposited by pulsed laser deposition in earlier work ranged from 0.5 to 1.2 kOe. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0018-9464 1941-0069 |
DOI: | 10.1109/TMAG.2003.816044 |