Synthesis and investigation of properties of N-[[bis(trimethylsilyl)amino](fluoro)boryl]-(trimethyl)-N-(trimethylsilyl)silanamine

The synthesis and investigation of properties of N-[[bis(trimethylsilyl)amino](fluoro)boryl]-(trimethyl)-N-(trimethylsilyl)silanamine as a possible precursor for the preparation of SiB x C y N z films were carried out. The identity of the compound has been confirmed by elemental analysis, IR, and 1...

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Bibliographic Details
Published in:	Glass physics and chemistry Vol. 40; no. 2; pp. 261 - 266
Main Authors:	Sysoev, S. V., Nikulina, L. D., Gostevskii, B. A., Merenkov, I. S., Pushkarev, R. V., Rakhlin, V. I., Kosinova, M. L.
Format:	Journal Article
Language:	English
Published:	Moscow Pleiades Publishing 01-03-2014 Springer Nature B.V
Subjects:	Ceramics Characterization and Evaluation of Materials Chemical vapor deposition Chemistry and Materials Science Composites Glass Infrared radiation Intervals Materials Science Natural Materials NMR spectroscopy Physical Chemistry Precursors Spectroscopy Synthesis Volatility synthesis modelling of CVD processes N-[[bis(trimethylsilyl)amino](fluoro)boryl]-(trimethyl)-N-(trimethylsilyl)silanamine vapor pressure
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