Plasma Interaction with Boundary Surfaces in Low-Pressure Radio-Frequency Capacitive Discharge

• Published in: Physics of atomic nuclei Vol. 82; no. 10; pp. 1433 - 1436
• Main Authors: Savinov, V. P., Kruglov, M. S., Riaby, V. A., Chervyakov, A. V., Yakunin, V. G.
• Format: Journal Article
• Language: English
• Published: Moscow Pleiades Publishing 01-12-2019; Springer; Springer Nature B.V
• Subjects: Analysis; Discharge; Electric waves; Electromagnetic radiation; Electromagnetic waves; Electron beams; Electron energy; Electrons; Energy spectra; Interaction of Plasma; LC circuits; Low pressure; Nonequilibrium plasmas; Particle and Nuclear Physics; Particle Beams; Physics; Physics and Astronomy; Plasma interactions; Radiation with Matter; Radio frequency; boundary surfaces; near-electrode layer of space charge; RF capacitive discharge; electron beams; beam-plasma instability; plasma; electron emission; caviton
• ISSN: 1063-7788; 1562-692X
• DOI: 10.1134/S106377881910017X

A particular case of a problem on interaction of plasma with a surface is examined experimentally. We study interaction of its own plasma with boundary surfaces in a low-pressure radio-frequency (RF) capacitive discharge (RFCD) by considering their functions. On the basis of the physical model of RFCD substantiated earlier, we examine experimentally the physical conditions taking place in a near-electrode layer of space discharge, which lead to formation of pulsed electron beams and highly non-equilibrium plasma electron energy spectrum. We verify experimentally the known fact that in RFCD it is possible to generate natural oscillating LC circuits modulating the discharge current, and the conditions of their excitation by their own electron beams are clarified.