Rapid fabrication technique of nano/microfluidic device with high mechanical stability utilizing two-step soft lithography

We established a rapid fabrication technique utilizing two-step soft lithography to realize rigid nano/microfluidic devices which have high mechanical and thermal stability, good chemical resistance and replication accuracy. The proposed technique enables the production of rigid nano/micro structure...

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Published in:	Sensors and actuators. B, Chemical Vol. 201; pp. 407 - 412
Main Authors:	Mogi, Katsuo, Sugii, Yasuhiko, Yamamoto, Takatoki, Fujii, Teruo
Format:	Journal Article
Language:	English
Published:	Elsevier B.V 01-10-2014
Subjects:	Micro fabrication Microfluidic device Nano fabrication PDMS Poly-dimethylsiroxane Nano fabrication Micro fabrication Poly-dimethylsiroxane Microfluidic device PDMS
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Abstract	We established a rapid fabrication technique utilizing two-step soft lithography to realize rigid nano/microfluidic devices which have high mechanical and thermal stability, good chemical resistance and replication accuracy. The proposed technique enables the production of rigid nano/micro structures including inlet and outlet ports by utilizing a mold master made from a soft material, conveniently and inexpensively. A device made from a thermosetting epoxy resin instead of a hard material showed a high replication accuracy, even with a high-aspect-ratio micro structure, and demonstrated sufficient mechanical stability at pressures exceeding 0.4MPa. It is possible to realize the nano/microfluidic devices with high aspect ratios, high depth, and low surface roughness, such as nano-dot arrays, well structures, nano/micro channels, and other small and/or precise structures.
AbstractList	We established a rapid fabrication technique utilizing two-step soft lithography to realize rigid nano/microfluidic devices which have high mechanical and thermal stability, good chemical resistance and replication accuracy. The proposed technique enables the production of rigid nano/micro structures including inlet and outlet ports by utilizing a mold master made from a soft material, conveniently and inexpensively. A device made from a thermosetting epoxy resin instead of a hard material showed a high replication accuracy, even with a high-aspect-ratio micro structure, and demonstrated sufficient mechanical stability at pressures exceeding 0.4MPa. It is possible to realize the nano/microfluidic devices with high aspect ratios, high depth, and low surface roughness, such as nano-dot arrays, well structures, nano/micro channels, and other small and/or precise structures.
Author	Yamamoto, Takatoki Sugii, Yasuhiko Mogi, Katsuo Fujii, Teruo
Author_xml	– sequence: 1 givenname: Katsuo surname: Mogi fullname: Mogi, Katsuo email: mogi.k.ab@m.titech.ac.jp organization: Mechanical and Control Engineering, Tokyo Institute of Technology, Japan – sequence: 2 givenname: Yasuhiko surname: Sugii fullname: Sugii, Yasuhiko organization: School of Engineering, The University of Tokyo, Japan – sequence: 3 givenname: Takatoki surname: Yamamoto fullname: Yamamoto, Takatoki organization: Mechanical and Control Engineering, Tokyo Institute of Technology, Japan – sequence: 4 givenname: Teruo surname: Fujii fullname: Fujii, Teruo organization: Institute of Industrial Science, The University of Tokyo, Japan
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Cites_doi	10.1116/1.589841 10.1109/TNB.2009.2035275 10.1146/annurev.bioeng.3.1.335 10.1088/0960-1317/11/3/315 10.1021/ac9703919 10.1039/c0lc00577k 10.1088/0957-4484/21/39/395502 10.1126/science.1076996 10.1021/ac9017605 10.1109/84.911105 10.1088/0960-1317/18/10/104003 10.1007/s002160101004 10.1039/B813061B 10.1002/anie.200600122 10.1063/1.1135404 10.1063/1.1136224 10.1016/S0167-9317(02)00494-X 10.1039/c2lc40998d 10.1038/nature05061 10.1016/j.sbi.2003.09.010
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Title	Rapid fabrication technique of nano/microfluidic device with high mechanical stability utilizing two-step soft lithography
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