Reduction of the coefficient of friction of niobium nitride coatings by the addition of bismuth
Composite coatings of niobium nitride containing bismuth inclusions were deposited using a dual magnetron sputtering system with independent power suppliers for each targets; Bi and Nb. The deposition was performed under and Ar/N2 atmosphere at a 2.3 flow rate ratio, which allows the stoichiometric...
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Published in: | Vacuum Vol. 125; pp. 146 - 153 |
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Main Authors: | , , , , , , , , , |
Format: | Journal Article |
Language: | English |
Published: |
Elsevier Ltd
01-03-2016
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Subjects: | |
Online Access: | Get full text |
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