Anomalous depth distribution of Fe and Co atoms in polyimide implanted to high fluence

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 191; no. 1; pp. 695 - 699
• Main Authors: Popok, V.N., Khaibullin, R.I., Bazarov, V.V., Valeev, V.F., Hnatowicz, V., Mackova, A., Odzhaev, V.B.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01-05-2002
• Subjects: Depth profiles; Ion implantation; Polyimide; Structural and composition changes; Structural and composition changes; Polyimide; Ion implantation; Depth profiles
• ISSN: 0168-583X; 1872-9584
• DOI: 10.1016/S0168-583X(02)00635-3

Polyimide foils were implanted with 40 keV Fe
+ and Co
+ ions to the fluences of 2.5×10
16–1.25×10
17 cm
−2 at ion current densities of 4, 8 and 12 μA/cm
2. Structural and composition alterations of the implanted polymer are studied using transmission electron microscopy and Rutherford back-scattering methods. Ion implantation results in formation of the near-surface carbonaceous layer filled up to 25 at.% of the embedded metal. Anomalous depth profiles of the metals, consisting of a strong near-surface peak and two weaker ones beyond the implanted layer, are observed. Possible mechanisms of the metal redistribution are discussed.