Two-dimensional waveguide based photonic microstructures in GaAs and InP

Two-dimensional waveguide based photonic microstructures in GaAs and InP

The fabrication and characterisation of two-dimensional photonic microstructures with a period of 190 nm exhibiting clear photonic bandgap effects is reported. We show that structures with near-perfect sixfold rotational symmetry are produced by electron-beam lithography and transferred into the mat...

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Bibliographic Details
Published in:Microelectronic engineering Vol. 35; no. 1-4; pp. 29 - 32
Main Authors: Krauss, T.F., Smith, C.J.M., Vögele, B., Murad, S.K., Wilkinson, C.D.W., Grant, R.S., Burt, M.G., De La Rue, R.M.
Format: Journal Article
Language:English
Published: Elsevier B.V 01-02-1997
Online Access:Get full text
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Summary:The fabrication and characterisation of two-dimensional photonic microstructures with a period of 190 nm exhibiting clear photonic bandgap effects is reported. We show that structures with near-perfect sixfold rotational symmetry are produced by electron-beam lithography and transferred into the material by dry etching with high aspect ratio.
Bibliography:SourceType-Scholarly Journals-2
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ObjectType-Conference Paper-1
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SourceType-Conference Papers & Proceedings-1
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ISSN:0167-9317
1873-5568
DOI:10.1016/S0167-9317(96)00127-X