Dependence of the resonance frequency of thermally excited microcantilever resonators on temperature

• Published in: Sensors and actuators. A. Physical. Vol. 101; no. 1; pp. 37 - 41
• Main Authors: Jianqiang, Han, Changchun, Zhu, Junhua, Liu, Yongning, He
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 30-09-2002; Elsevier Science
• Subjects: Exact sciences and technology; Fundamental areas of phenomenology (including applications); Induced mass; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Measurement and testing methods; Measurement methods and techniques in continuum mechanics of solids; Mechanical instruments, equipment and techniques; Microcantilever; Micromechanical devices and systems; Physics; Resonator; Solid mechanics; Structural and continuum mechanics; Thermal excitation; Induced mass; Resonator; Thermal excitation; Microcantilever; Micromechanical devices; Temperature dependence; Resonance frequency; Silicon; Sensors; Experimental study; Resonators; Silica; Bilayers
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/S0924-4247(02)00146-2

The dependence of the resonance frequency of thermally excited microcantilever resonators on temperature has been reported by several papers. All these papers ignored the film grown or deposited on the surface of a cantilever and regarded the beam as a single layer one. As a result, there was difference between the theoretical model and experimental results. The paper proposes a bilayer beam model to calculate the dependence of resonance frequency on temperature. This novel model regard the film as another mechanical layer and takes the induced mass by the surrounding gas into account. The calculated results are in good agreement with experimental results.