Low-loss optical waveguide on standard SOI/SIMOX substrate

Propagation loss measurements are reported for silicon waveguides formed by the thin silicon film of standard SIMOX substrate. Values very close to the theoretical limit associated with leakage towards the substrate are obtained when a high quality interface between the silicon film and the passivat...

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Bibliographic Details
Published in:	Optics communications Vol. 146; no. 1; pp. 31 - 33
Main Authors:	Layadi, A, Vonsovici, A, Orobtchouk, R, Pascal, D, Koster, A
Format:	Journal Article
Language:	English
Published:	Amsterdam Elsevier B.V 15-01-1998 Elsevier Science
Subjects:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Integrated optics. Optical fibers and wave guides Optical and optoelectronic circuits Propagation loss SIMOX Surface passivation Waveguide Waveguides, couplers, and arrays SIMOX Propagation loss Waveguide Surface passivation SIMOX technology Loss Optical waveguide Silicon Experimental study Surface treatment Passivation
Online Access:	Get full text
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