Heteroepitaxial deposition of single-crystal diamond particles on sharpened Si tips

Heteroepitaxial deposition of single-crystal diamond particles on sharpened Si tips

Heteroepitaxial single-crystal diamond particles were formed on sharpened Si tips in a hot-filament CVD process at increased content of atomic hydrogen in the vapor phase.

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Bibliographic Details
Published in:Materials letters Vol. 22; no. 5; pp. 285 - 288
Main Authors: Stepanova, A.N., Aksenova, L.L., Kuznetsov, A.V., Rakova, E.V., Givargizov, E.I.
Format: Journal Article
Language:English
Published: Elsevier B.V 01-03-1995
Online Access:Get full text
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Description
Summary:Heteroepitaxial single-crystal diamond particles were formed on sharpened Si tips in a hot-filament CVD process at increased content of atomic hydrogen in the vapor phase.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0167-577X
1873-4979
DOI:10.1016/0167-577X(94)00260-6