Combination of excimer laser micromachining and replication processes suited for large scale production

Results are reported obtained by a process sequence comprising excimer laser ablation of microstructures, inverse replication by an electroplating process and second inverse replication by injection moulding (“Laser-LIGA”). Thus, the original microstructures, made from PMMA and novolak layers applyi...

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Published in:	Applied surface science Vol. 86; no. 1; pp. 251 - 258
Main Authors:	Arnold, J., Dasbach, U., Ehrfeld, W., Hesch, K., Löwe, H.
Format:	Journal Article Conference Proceeding
Language:	English
Published:	Amsterdam Elsevier B.V 01-02-1995 Elsevier Science
Subjects:	Applied sciences Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Scanning electron microscopy Mass production X ray lithography Methyl methacrylate polymer Electroplating Experimental study Aspect ratio Microelectronic fabrication Novolac Injection molding Replication Laser beam machining Microstructure Production process
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Abstract	Results are reported obtained by a process sequence comprising excimer laser ablation of microstructures, inverse replication by an electroplating process and second inverse replication by injection moulding (“Laser-LIGA”). Thus, the original microstructures, made from PMMA and novolak layers applying a commercial 193 nm excimer laser micromachining work-station and showing structural variety and aspect ratios up to 10, were replicated with high structural fidelity by a low cost process suited for large scale production.
AbstractList	Results are reported obtained by a process sequence comprising excimer laser ablation of microstructures, inverse replication by an electroplating process and second inverse replication by injection moulding (“Laser-LIGA”). Thus, the original microstructures, made from PMMA and novolak layers applying a commercial 193 nm excimer laser micromachining work-station and showing structural variety and aspect ratios up to 10, were replicated with high structural fidelity by a low cost process suited for large scale production.
Author	Ehrfeld, W. Löwe, H. Dasbach, U. Hesch, K. Arnold, J.
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References	Küper, Brannon (bib13) 1992; 236 Rumsby, Gower (bib5) 1991; 1598 Kitai, Popkov, Semchishen (bib10) 1990; 37 Gower, Rumsby, Thomas (bib6) 1992; 1835 Küper, Stuke (bib2) 1987; 44 Phillips, Callahan, LeBlanc, Ball, Sauerbrey (bib7) 1993; 285 Sutcliffe, Srinivasan (bib4) 1986; 60 W. Ehrfeld and H. Lehr, Radiat. Phys. Chem., in press. Srinivasan, Braren (bib1) 1984; 22 Ehrfeld, Münchmeyer (bib8) 1991; 303 Kahlert, Sarbach, Burghardt, Klimt (bib12) 1992; 1835 Braun, Nowak, Hess, Oetzmann, Schmidt (bib3) 1989; 43 Lankard, Wolbold (bib11) 1992; 54 Küper (10.1016/0169-4332(94)00386-6_bib13) 1992; 236 Gower (10.1016/0169-4332(94)00386-6_bib6) 1992; 1835 Braun (10.1016/0169-4332(94)00386-6_bib3) 1989; 43 Phillips (10.1016/0169-4332(94)00386-6_bib7) 1993; 285 10.1016/0169-4332(94)00386-6_bib9 Sutcliffe (10.1016/0169-4332(94)00386-6_bib4) 1986; 60 Srinivasan (10.1016/0169-4332(94)00386-6_bib1) 1984; 22 Kahlert (10.1016/0169-4332(94)00386-6_bib12) 1992; 1835 Rumsby (10.1016/0169-4332(94)00386-6_bib5) 1991; 1598 Kitai (10.1016/0169-4332(94)00386-6_bib10) 1990; 37 Lankard (10.1016/0169-4332(94)00386-6_bib11) 1992; 54 Ehrfeld (10.1016/0169-4332(94)00386-6_bib8) 1991; 303 Küper (10.1016/0169-4332(94)00386-6_bib2) 1987; 44
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SubjectTerms	Applied sciences Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Title	Combination of excimer laser micromachining and replication processes suited for large scale production
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