Magnetic field resilient high kinetic inductance superconducting niobium nitride coplanar waveguide resonators

We characterize niobium nitride (NbN) λ / 2 coplanar waveguide resonators, which were fabricated from a 10-nm-thick film on silicon dioxide grown by sputter deposition. For films grown at 180 °C, we report a superconducting critical temperature of 7.4 K associated with a normal square resistance of...

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Bibliographic Details

Published in:	Applied physics letters Vol. 118; no. 5
Main Authors:	Yu, Cécile Xinqing, Zihlmann, Simon, Troncoso Fernández-Bada, Gonzalo, Thomassin, Jean-Luc, Gustavo, Frédéric, Dumur, Étienne, Maurand, Romain
Format:	Journal Article
Language:	English
Published:	American Institute of Physics 01-02-2021
Subjects:	Condensed Matter Physics Quantum Physics Superconductivity
Online Access:	Get full text
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