Nanostructured multielement (TiHfZrNbVTa)N coatings before and after implantation of N+ ions (1018cm−2): Their structure and mechanical properties

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 385; pp. 74 - 83
• Main Authors: Pogrebnjak, A.D., Bondar, O.V., Borba, S.O., Abadias, G., Konarski, P., Plotnikov, S.V., Beresnev, V.M., Kassenova, L.G., Drodziel, P.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01-10-2016; Elsevier
• Subjects: Coatings; Condensed Matter; Deposition; Elasticity modulus; Implantation; Ion implantation; Materials Science; Microstructure; Multielement coatings; N+ implantation; Nanohardness; Nanostructure; Nitrides; Physics; Transmission electron microscopy; X-ray diffraction; Nanohardness; N+ implantation; Microstructure; Elasticity modulus; Multielement coatings
• ISSN: 0168-583X; 1872-9584; 1872-9584; 0168-583X
• DOI: 10.1016/j.nimb.2016.09.002

•(TiZrHfVNbTa)N coatings were deposited by vacuum–arc evaporation of a cathode.•Nanostructured coatings were investigated experimentally and by MD simulations.•Good correlation between experimental data and simulation results is observed.•Ion implantation formed amorphous, nanocrystalline and nanostructured layers.•Hardness changed from 12GPa in the implanted layer to 38GPa with the depth.
Multielement high entropy alloy (HEA) nitride (TiHfZrNbVTa)N coatings were deposited by vacuum arc and their structural and mechanical stability after implantation of high doses of N+ ions, 1018cm−2, were investigated. The crystal structure and phase composition were characterized by X-ray diffraction (XRD) and Transmission Electron Microscopy, while depth-resolved nanoindentation tests were used to determine the evolution of hardness and elastic modulus along the implantation depth. XRD patterns show that coatings exhibit a main phase with fcc structure, which preferred orientation varies from (111) to (200), depending on the deposition conditions. First-principles calculations reveal that the presence of Nb atoms could favor the formation of solid solution with fcc structure in multielement HEA nitride. TEM results showed that amorphous and nanostructured phases were formed in the implanted coating sub-surface layer (∼100nm depth). Concentration of nitrogen reached 90at% in the near-surface layer after implantation, and decreased at higher depth. Nanohardness of the as-deposited coatings varied from 27 to 38GPa depending on the deposition conditions. Ion implantation led to a significant decrease of the nanohardness to 12GPa in the implanted region, while it reaches 24GPa at larger depths. However, the H/E ratio is ⩾0.1 in the sub-surface layer due to N+ implantation, which is expected to have beneficial effect on the wear properties.