Analysis of damping optimization through perforations in proof-mass of SOI capacitive accelerometer

MEMS capacitive accelerometers are ubiquitously used in wide-ranging applications. Different applications require a trade-off between design parameters to realize either high sensitivity or precision or wide-dynamic range or speed of response. Planar MEMS structures for sensors usually have a large...

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Bibliographic Details
Published in:	Analog integrated circuits and signal processing Vol. 102; no. 3; pp. 605 - 615
Main Authors:	Kalaiselvi, S., Sujatha, L., Sundar, R.
Format:	Journal Article
Language:	English
Published:	New York Springer US 01-03-2020 Springer Nature B.V
Subjects:	Accelerometers Air gaps Circuits and Systems Coefficients Damping Design parameters Electrical Engineering Engineering Microelectromechanical systems Numerical analysis Optimization Parameter sensitivity Perforation Reduction Resonant frequencies Sensitivity Signal,Image and Speech Processing Structural design Structural engineering Tradeoffs Squeeze film damping Perforated proof mass SOI capacitive accelerometer Solid fluid interaction
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