Field emission from diamond coated molybdenum field emitters

Field emission from diamond coated molybdenum field emitters

Diamond deposition onto single Mo field emitters was accomplished by two methods: microwave plasma chemical vapor deposition and a dielectrophoresis of diamond powder. Observation by transmission electron microscopy and scanning electron microscopy revealed a significant amount of deposition at the...

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Bibliographic Details
Published in:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Vol. 14; no. 3; pp. 2050 - 2055
Main Authors: Choi, W. B., Liu, J., McClure, M. T., Myers, A. F., Zhirnov, V. V., Cuomo, J. J., Hren, J. J.
Format: Conference Proceeding
Language:English
Published: 01-05-1996
Subjects:
CHEMICAL VAPOR DEPOSITION
Mo
diamond
CATHODES
MOLYBDENUM
DIAMONDS
FIELD EMISSION
MICROSTRUCTURE
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Summary:Diamond deposition onto single Mo field emitters was accomplished by two methods: microwave plasma chemical vapor deposition and a dielectrophoresis of diamond powder. Observation by transmission electron microscopy and scanning electron microscopy revealed a significant amount of deposition at the tips. The field emission characteristics were measured before and after diamond deposition on the same emitters. Field emission from diamond coated emitters yielded significant increases in emission current and lower Fowler–Nordheim slopes. We discuss a possible mechanism to explain current enhancement that depends primarily upon the Mo‐diamond interface.
ISSN:0734-211X
1520-8567
DOI:10.1116/1.588984