Thermodynamic Modeling and Experimental Implementation of the Synthesis of Vanadium Oxide Films

• Published in: Russian journal of inorganic chemistry Vol. 68; no. 5; pp. 580 - 586
• Main Authors: Shestakov, V. A., Seleznev, V. A., Mutilin, S. V., Kichay, V. N., Yakovkina, L. V.
• Format: Journal Article
• Language: English
• Published: Moscow Pleiades Publishing 01-05-2023; Springer Nature B.V
• Subjects: Argon; Atmospheric models; Atomic layer epitaxy; Chemistry; Chemistry and Materials Science; Inorganic Chemistry; Oxide coatings; Physicochemical Analysis of Inorganic Systems; Synthesis; Thermodynamic models; Thermodynamics; Vanadium oxides; vanadium dioxide; atomic layer deposition; thermodynamic modeling; vanadium pentoxide; thin films
• ISSN: 0036-0236; 1531-8613
• DOI: 10.1134/S0036023623600491

The paper describes the thermodynamic modeling and experimental study of the synthesis of vanadium oxide films at various temperatures from the tetrakis(ethylmethylaminovanadium) V[NC
3
H
8
]
4
precursor in the presence of oxygen in an argon atmosphere. The thermodynamic modeling was carried out using the calculation of chemical equilibria based on the minimization of the Gibbs energy of the system. In the experimental part of the paper, the films were synthesized by the atomic layer deposition procedure. The thermodynamic modeling and experimental results agree with each other and can be used to develop procedures for the synthesis of film coatings based on vanadium oxides.