Determination of the composition and thickness of chromel and alumel thin films on different substrates by quantitative energy dispersive spectroscopy analysis

Thin films of two alloys (chromel and alumel), with thickness less than 100 nm, were obtained by plasma deposition technique, namely filtered cathodic vacuum arc (FCVA). The elemental analyses were performed by quantitative energy dispersive spectroscopy (EDS) microanalysis and Rutherford backscatte...

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Bibliographic Details
Published in:	Microscopy research and technique Vol. 85; no. 2; pp. 437 - 446
Main Authors:	Lima de Oblitas, Raissa, Teixeira, Fernanda, Salvadori, Maria Cecília
Format:	Journal Article
Language:	English
Published:	Hoboken, USA John Wiley & Sons, Inc 01-02-2022 Wiley Subscription Services, Inc
Subjects:	alumel Arc deposition Atomic properties Backscattering Chemical composition chromel Composition Copper Dispersion energy dispersive spectroscopy Plasma deposition quantitative microanalysis Spectrometry Spectroscopy Statistical analysis Substrates Thickness measurement Thin films Tin energy dispersive spectroscopy quantitative microanalysis chromel alumel thin films
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