Deposition of cubic boron nitride by laser ablation
Boron nitride films were obtained as a result of laser ablation of a nano-grained c-BN target. The films consist mainly of boron and nitrogen as well as some carbon and oxygen according to the results of Auger electron spectroscopy. The results of electron diffraction from the film indicate the pres...
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| Published in: | Diamond and related materials Vol. 10; no. 3; pp. 1385 - 1389 |
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| Main Authors: | , , , , , |
| Format: | Journal Article |
| Language: | English |
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Elsevier B.V
01-03-2001
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| Abstract | Boron nitride films were obtained as a result of laser ablation of a nano-grained c-BN target. The films consist mainly of boron and nitrogen as well as some carbon and oxygen according to the results of Auger electron spectroscopy. The results of electron diffraction from the film indicate the presence of c-BN crystals in the deposit. |
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| AbstractList | Boron nitride films were obtained as a result of laser ablation of a nano-grained c-BN target. The films consist mainly of boron and nitrogen as well as some carbon and oxygen according to the results of Auger electron spectroscopy. The results of electron diffraction from the film indicate the presence of c-BN crystals in the deposit. |
| Author | Khvostov, V.V. Bregadze, A.U. Guden, V.S. Konyashin, I. Guseva, M.B. Babaev, V.G. |
| Author_xml | – sequence: 1 givenname: M.B. surname: Guseva fullname: Guseva, M.B. organization: Department of Physics, Moscow State University, Vorobjovy Gory, Moscow 119099, Russia – sequence: 2 givenname: V.G. surname: Babaev fullname: Babaev, V.G. organization: Department of Physics, Moscow State University, Vorobjovy Gory, Moscow 119099, Russia – sequence: 3 givenname: V.S. surname: Guden fullname: Guden, V.S. organization: Department of Physics, Moscow State University, Vorobjovy Gory, Moscow 119099, Russia – sequence: 4 givenname: V.V. surname: Khvostov fullname: Khvostov, V.V. organization: Department of Physics, Moscow State University, Vorobjovy Gory, Moscow 119099, Russia – sequence: 5 givenname: A.U. surname: Bregadze fullname: Bregadze, A.U. organization: Department of Physics, Moscow State University, Vorobjovy Gory, Moscow 119099, Russia – sequence: 6 givenname: I. surname: Konyashin fullname: Konyashin, I. email: ikonyashin@boartlongyear-eu.com organization: Max-Planck-Institut für Metallforschung, Heisenbergstr. 5, D-70569 Stuttgart, Germany |
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| Cites_doi | 10.1016/S0169-4332(97)00670-3 10.1103/PhysRevB.23.6348 10.1016/0925-9635(94)90180-5 10.1016/0038-1098(68)90503-6 |
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| Copyright | 2001 Elsevier Science B.V. |
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| EndPage | 1389 |
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| GroupedDBID | --K --M .~1 0R~ 123 1B1 1~. 1~5 29G 4.4 457 4G. 5VS 7-5 71M 8P~ 9JN AABNK AABXZ AACTN AAEDT AAEDW AAEPC AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AAQXK AAXUO ABFNM ABFRF ABJNI ABMAC ABXDB ABXRA ABYKQ ACDAQ ACGFO ACGFS ACIWK ACNNM ACRLP ADBBV ADEZE ADMUD ADTZH AEBSH AECPX AEFWE AEKER AENEX AEZYN AFKWA AFRZQ AFTJW AGHFR AGUBO AGYEJ AHHHB AHJVU AIEXJ AIKHN AITUG AIVDX AJBFU AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ ASPBG AVWKF AXJTR AZFZN BJAXD BKOJK BLXMC CS3 DU5 EBS EFJIC EFLBG EJD EO8 EO9 EP2 EP3 F5P FDB FEDTE FGOYB FIRID FNPLU FYGXN G-2 G-Q GBLVA HVGLF HZ~ IHE J1W JJJVA KOM M24 M41 MAGPM MO0 N9A O-L O9- OAUVE OGIMB OZT P-8 P-9 P2P PC. Q38 R2- RIG RNS ROL RPZ SDF SDG SDP SES SEW SMS SPC SPCBC SPD SSM SST SSZ T5K WUQ XFK XPP ZMT ~02 ~G- AAXKI AAYXX AFJKZ AKRWK CITATION |
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| Keywords | Deposition c-BN Laser ablation |
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| References | Wessmantel, Reisse, Keiper (BIB1) 1998; 129 Nemanich, Solin, Martin (BIB4) 1981; 23 Brafman, Lengel (BIB3) 1968; 6 Guseva, Babaev, Khvostov (BIB2) 1994; 3 Guseva (10.1016/S0925-9635(01)00370-3_BIB2) 1994; 3 Brafman (10.1016/S0925-9635(01)00370-3_BIB3) 1968; 6 Wessmantel (10.1016/S0925-9635(01)00370-3_BIB1) 1998; 129 Nemanich (10.1016/S0925-9635(01)00370-3_BIB4) 1981; 23 |
| References_xml | – volume: 23 start-page: 6348 year: 1981 ident: BIB4 publication-title: Phys. Rev. B contributor: fullname: Martin – volume: 129 start-page: 444 year: 1998 ident: BIB1 publication-title: Appl. Surf. Sci. contributor: fullname: Keiper – volume: 6 start-page: 523 year: 1968 ident: BIB3 publication-title: Solid State. Commun. contributor: fullname: Lengel – volume: 3 start-page: 328 year: 1994 ident: BIB2 publication-title: Diam. Relat. Mater. contributor: fullname: Khvostov – volume: 129 start-page: 444 year: 1998 ident: 10.1016/S0925-9635(01)00370-3_BIB1 publication-title: Appl. Surf. Sci. doi: 10.1016/S0169-4332(97)00670-3 contributor: fullname: Wessmantel – volume: 23 start-page: 6348 year: 1981 ident: 10.1016/S0925-9635(01)00370-3_BIB4 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.23.6348 contributor: fullname: Nemanich – volume: 3 start-page: 328 year: 1994 ident: 10.1016/S0925-9635(01)00370-3_BIB2 publication-title: Diam. Relat. Mater. doi: 10.1016/0925-9635(94)90180-5 contributor: fullname: Guseva – volume: 6 start-page: 523 year: 1968 ident: 10.1016/S0925-9635(01)00370-3_BIB3 publication-title: Solid State. Commun. doi: 10.1016/0038-1098(68)90503-6 contributor: fullname: Brafman |
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| Snippet | Boron nitride films were obtained as a result of laser ablation of a nano-grained c-BN target. The films consist mainly of boron and nitrogen as well as some... |
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| SubjectTerms | c-BN Deposition Laser ablation |
| Title | Deposition of cubic boron nitride by laser ablation |
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