Deposition of cubic boron nitride by laser ablation

Deposition of cubic boron nitride by laser ablation

Boron nitride films were obtained as a result of laser ablation of a nano-grained c-BN target. The films consist mainly of boron and nitrogen as well as some carbon and oxygen according to the results of Auger electron spectroscopy. The results of electron diffraction from the film indicate the pres...

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Bibliographic Details
Published in:Diamond and related materials Vol. 10; no. 3; pp. 1385 - 1389
Main Authors: Guseva, M.B., Babaev, V.G., Guden, V.S., Khvostov, V.V., Bregadze, A.U., Konyashin, I.
Format: Journal Article
Language:English
Published: Elsevier B.V 01-03-2001
Subjects:
c-BN
Deposition
Laser ablation
Deposition
c-BN
Laser ablation
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Summary:Boron nitride films were obtained as a result of laser ablation of a nano-grained c-BN target. The films consist mainly of boron and nitrogen as well as some carbon and oxygen according to the results of Auger electron spectroscopy. The results of electron diffraction from the film indicate the presence of c-BN crystals in the deposit.
ISSN:0925-9635
1879-0062
DOI:10.1016/S0925-9635(01)00370-3