Visualization of acoustic fields in surface acoustic wave devices by means of X-ray topography

Visualization of acoustic fields in surface acoustic wave devices by means of X-ray topography

Reflection X-ray topographs from acousto-optic devices were measured under surface acoustic wave excitation. Enhanced sensitivity to small ultrasound amplitudes was achieved when the ultrasound wavelength was shorter than the X-ray extinction length. Under this condition an X-ray diffraction image o...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 97; no. 1-4; pp. 346 - 350
Main Authors: Zolotoyabko, E., Jacobsohn, E., Bartunik, H., Polikarpov, I., Koelln, I., Krane, H.G.
Format: Journal Article
Language:English
Published: Elsevier B.V 02-05-1995
Online Access:Get full text
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Summary:Reflection X-ray topographs from acousto-optic devices were measured under surface acoustic wave excitation. Enhanced sensitivity to small ultrasound amplitudes was achieved when the ultrasound wavelength was shorter than the X-ray extinction length. Under this condition an X-ray diffraction image of a high-frequency traveling surface acoustic wave was obtained despite the strains in the device caused by microelectronic processing.
ISSN:0168-583X
1872-9584
DOI:10.1016/0168-583X(94)00733-0