Electron transport coefficients in N2O in RF electric and magnetic fields

Electron transport coefficients in N2O in RF electric and magnetic fields

A Monte Carlo simulation technique is used to investigate electron transport in N2O in crossed RF electric and magnetic fields. Our work has resulted in a database of transport parameters which can be used for correct implementation in modeling RF discharges. A behavior of transport coefficients und...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 267; no. 2; pp. 377 - 381
Main Authors: Šašić, Olivera, Dupljanin, Snježana, Dujko, Saša, Petrović, Zoran Lj
Format: Journal Article
Language:English
Published: Elsevier B.V 01-01-2009
Subjects:
Monte Carlo
N2O
RF fields
Transport coefficients
Monte Carlo
Transport coefficients
N2O
51.10.+y
52.65.-y
52.80.Pi
34.80.-i
RF fields
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Summary:A Monte Carlo simulation technique is used to investigate electron transport in N2O in crossed RF electric and magnetic fields. Our work has resulted in a database of transport parameters which can be used for correct implementation in modeling RF discharges. A behavior of transport coefficients under the influence of the magnitude and the frequency of the fields was studied separately revealing some complex features in the time dependence, most notably anomalous anisotropic diffusion and time-resolved negative differential conductivity.
ISSN:0168-583X
1872-9584
DOI:10.1016/j.nimb.2008.10.025