Conformal coating by liquid route on three-dimensional topology

Conformal coating by liquid route on three-dimensional topology

We demonstrated a new approach to the production of three-dimensional-coated patterns using the liquid route. Metallic perovskite oxides were coated onto three-dimensional (3D) micro-structured substrates with different aspect ratios. The method’s success relies on the solution viscosity being adjus...

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Bibliographic Details
Published in:The European physical journal. ST, Special topics Vol. 231; no. 24; pp. 4245 - 4253
Main Authors: Poirot, Nathalie, Tillocher, Thomas, Raynal, Pierre-Ivan
Format: Journal Article
Language:English
Published: Berlin/Heidelberg Springer Berlin Heidelberg 01-12-2022
Springer Nature B.V
EDP Sciences
Subjects:
Aspect ratio
Atomic
Chemical Sciences
Classical and Continuum Physics
Condensed Matter Physics
Engineered Materials: Micro-Nano-Structure
Materials Science
Measurement Science and Instrumentation
Molecular
Optical and Plasma Physics
Perovskites
Physics
Physics and Astronomy
Properties and Applications
Regular Article
Silicon substrates
Spin coating
Thin films
Topology
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Description
Summary:We demonstrated a new approach to the production of three-dimensional-coated patterns using the liquid route. Metallic perovskite oxides were coated onto three-dimensional (3D) micro-structured substrates with different aspect ratios. The method’s success relies on the solution viscosity being adjusted by adding viscous liquid. The process of oxide thin films follows three stages: preparing the precursor solution, coating the solution by spin-coating process onto three-dimensional-Si substrates, and post-annealing. Chemical solution 3D-coating is conformal.
ISSN:1951-6355
1951-6401
DOI:10.1140/epjs/s11734-022-00579-6