YSZ thin film nanostructured battery for on-chip energy storage applications
•YSZ films used as electrolyte in solid state storage device.•Ultrathin YSZ (< 50 nm) was deposited by atomic layer deposition on transition metal/oxides electrodes.•The discharge behavior is similar to those of batteries.•Energy storage depends on the operation temperature. Thin film solid-state...
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Published in: | Journal of energy storage Vol. 28; p. 101220 |
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Main Authors: | , , , , , , , |
Format: | Journal Article |
Language: | English |
Published: |
Elsevier Ltd
01-04-2020
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Subjects: | |
Online Access: | Get full text |
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