YSZ thin film nanostructured battery for on-chip energy storage applications

•YSZ films used as electrolyte in solid state storage device.•Ultrathin YSZ (< 50 nm) was deposited by atomic layer deposition on transition metal/oxides electrodes.•The discharge behavior is similar to those of batteries.•Energy storage depends on the operation temperature. Thin film solid-state...

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Bibliographic Details
Published in:Journal of energy storage Vol. 28; p. 101220
Main Authors: Lizarraga, Eder, Read, John, Solorio, Fernando, Torres, Gerson, Vazquez, Jorge, Murillo, Eduardo, Soto, Gerardo, Tiznado, Hugo
Format: Journal Article
Language:English
Published: Elsevier Ltd 01-04-2020
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