Batch Assembly of SU-8 Movable Components in Channel Under Mild Conditions for Dynamic Microsystems:Application to Biohybrid Systems

• Published in: Journal of microelectromechanical systems Vol. 28; no. 3; pp. 419 - 428
• Main Authors: Nagai, Moeto, Tanizaki, Kohei, Shibata, Takayuki
• Format: Journal Article
• Language: English
• Published: New York IEEE 01-06-2019; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Assembly; Autonomy; batch assembly; bioactuator; biohybrid system; Control equipment; Fabrication; Iron; magnetic cell patterning; Magnetic fields; Microchannels; Microfluidics; Microscopy; Motors; Movable component; Polymers; Resists; Substrates; water-soluble sacrificial layer
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/JMEMS.2019.2907285

Movable components in a microchannel are expected to develop dynamic microfluidics and new microfluidic applications. Biological motors are promising for the removal of external control units and provision of autonomy to microsystems. However, these components in a microchannel have not been widely used because of the lack of an easy-to-use method. This paper reports first the batch assembly of movable components in a microchannel under mild conditions for dynamic microsystems and second, an integration with biological motors, Vorticella . We studied the pattern formation of dextran film with different shapes to use it as a sacrificial layer. Photopolymer components were fabricated on a patterned dextran film and then a polymer component on a dextran film was directly assembled in a microfluidic chip. An injection of water dissolved the dextran and transported a movable component by a fluid force. This fabrication process was further applied to demonstrate the motion conversion of a movable component by Vorticella . Cells of Vorticella were patterned around magnetic blocks in a microchannel using a magnetic force. Finally, a movable component was integrated with Vorticella to convert its motion. Our developed technologies open the possibility of fabricating a wide range of dynamic microsystems.