Formulation analysis and follow up study of differential MEMS touch mode sensor utilizing capacitive vacuum gauge framework for low pressure measurements

Differential capacitance diaphragm gauges have become more popular in pressure measurements as they yield superior sensitivity and lesser non-linearity for pressure differential measurements. In addition, differential capacitance diaphragm gauges do not require a high vacuum reference cavity which r...

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Bibliographic Details
Published in:	IEEE sensors journal Vol. 23; no. 8; p. 1
Main Authors:	Sreekanth, P K, Jindal, Sumit Kumar
Format:	Journal Article
Language:	English
Published:	New York IEEE 15-04-2023 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects:	Capacitance Capacitive diaphragm gauge Circular Diaphragm Complexity Diaphragms (mechanics) Electrodes Glass High vacuum Low pressure Micromechanical devices Parameter sensitivity Robustness Sensitivity Sensors Substrates Touch mode Vacuum gages
Online Access:	Get full text
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