Formulation analysis and follow up study of differential MEMS touch mode sensor utilizing capacitive vacuum gauge framework for low pressure measurements

• Published in: IEEE sensors journal Vol. 23; no. 8; p. 1
• Main Authors: Sreekanth, P K, Jindal, Sumit Kumar
• Format: Journal Article
• Language: English
• Published: New York IEEE 15-04-2023; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Capacitance; Capacitive diaphragm gauge; Circular Diaphragm; Complexity; Diaphragms (mechanics); Electrodes; Glass; High vacuum; Low pressure; Micromechanical devices; Parameter sensitivity; Robustness; Sensitivity; Sensors; Substrates; Touch mode; Vacuum gages
• ISSN: 1530-437X; 1558-1748
• DOI: 10.1109/JSEN.2023.3251379

Differential capacitance diaphragm gauges have become more popular in pressure measurements as they yield superior sensitivity and lesser non-linearity for pressure differential measurements. In addition, differential capacitance diaphragm gauges do not require a high vacuum reference cavity which reduces their manufacturing complexity. Efficient analysis for modelling differential capacitance diaphragm gauges is thus increasingly becoming vital due to their innumerable use cases. The higher sensitivity of circular diaphragm for the same side length in comparison to square diaphragm makes it ideal for sensor design. In this work, a complete formulation for analysis of differential capacitive vacuum gauge with the circular diaphragm in normal and touch mode operation has been presented for the low-pressure range of (1 to 1500 pascals). A comprehensive study of sensor parameters like capacitance, diaphragm deflection, capacitive and mechanical sensitivity has been formulated to aid the choice of sensor characteristics. Computationally complex methods have been used in the past for analysis of circular diaphragms. MATLAB and COMSOL have been used to compute and simulate results.