Characterization of superconductor coplanar resonators deposited on different substrates by thermal coevaporation

• Published in: Journal of superconductivity and novel magnetism Vol. 19; no. 7-8; pp. 661 - 667
• Main Authors: SERON, D, KOKABI, H, ALQUIE, G, ROELENS, Y, BOURZGUI, N, CARRU, J. C
• Format: Conference Proceeding Journal Article
• Language: English
• Published: New York, NY Springer 01-11-2006; Springer Verlag
• Subjects: Applied sciences; Circuit properties; Electric, optical and optoelectronic circuits; Electronics; Engineering Sciences; Exact sciences and technology; Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits; Scanning electron microscopy; Superconductor device; X ray diffraction; Thin film; Engraving; Barium oxide; Surface conductivity; Yttrium oxide; Manufacturing; Coplanar waveguides; Microwave resonator; Copper oxide; Microstructure; High temperature superconductor
• ISSN: 1557-1939; 1557-1947
• DOI: 10.1007/s10948-006-0127-1

This study is based on two commercially available YBCO thin films deposited by the thermal coevaporation method on different substrates (MgO and LaAlO3). Those films should be optimized for microwave applications. The structure and microstructure of the film deposited on LaAlO3 have been investigated, respectively by XRD and SEM. These characterizations showed the high quality of the films concerning the c-axis orientation and the smooth and homogenous morphology. The films have then been etched into two different coplanar line resonators by ionic method (YBCO/LaAlO3) and chemical one (YBCO/MgO) and their microwave properties have been characterized in two different cryogenic experimental set-ups. Despite the differences between these coplanar resonators, we have obtained the same intrinsic parameters (lambda0 = 190 nm, T c=87 K with gamma = 3) corresponding to the data provided by THEVA and a very low surface resistance (R s=0.4 m Omega at 31 K and 10 GHz).