Modeling and simulation of the deposition/relaxation processes of polycrystalline diatomic structures of metallic nitride films

• Published in: Journal of crystal growth Vol. 418; pp. 70 - 78
• Main Authors: Garcia, M F, Restrepo-Parra, E, Riano-Rojas, J C
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 15-05-2015
• Subjects: A1. Monte Carlo; A1. Thin films; A3. Modeling; A3. Simulation; Algorithms; Atomic structure; Brackets; Computer simulation; Deposition; Grain size; Monte Carlo methods; Polycrystals; Roughness; Polycrystals; A3. Modeling; A1. Monte Carlo; A3. Simulation; A1. Thin films
• ISSN: 0022-0248; 1873-5002
• DOI: 10.1016/j.jcrysgro.2015.01.016

This work develops a model that mimics the growth of diatomic, polycrystalline thin films by artificially splitting the growth into deposition and relaxation processes including two stages: (1) a grain-based stochastic method (grains orientation randomly chosen) is considered and by means of the Kinetic Monte Carlo method employing a non-standard version, known as Constant Time Stepping, the deposition is simulated. The adsorption of adatoms is accepted or rejected depending on the neighborhood conditions; furthermore, the desorption process is not included in the simulation and (2) the Monte Carlo method combined with the metropolis algorithm is used to simulate the diffusion. The model was developed by accounting for parameters that determine the morphology of the film, such as the growth temperature, the interacting atomic species, the binding energy and the material crystal structure. The modeled samples exhibited an FCC structure with grain formation with orientations in the family planes of 〈111〉, 〈200〉 and 〈220〉. The grain size and film roughness were analyzed. By construction, the grain size decreased, and the roughness increased, as the growth temperature increased. Although, during the growth process of real materials, the deposition and relaxation occurs simultaneously, this method may perhaps be valid to build realistic polycrystalline samples.
•The growth process depends on the material type, especially on the binding energy.•Diatomic metallic nitrides with several orientations were simulated by Monte Carlo.•Roughness and grain size depends on the quantity of material deposited.