Origin of ion beam mixing effects on morphological features in solid-phase titanium silicide formation

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Bibliographic Details
Published in:	Applied Physics A Solids and Surfaces Vol. 50; no. 3; pp. 265 - 267
Main Authors:	Suzuki, Tadashi, Miyazaki, Takao, Natsuaki, Nobuyoshi
Format:	Journal Article
Language:	English
Published:	01-03-1990
Online Access:	Get full text
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Description
ISSN:	0721-7250 1432-0630
DOI:	10.1007/BF00324492