Two-Photon Laser Lithography of Active Microcavity Structures
Fabrication of active fluorescent microstructures with given parameters is an important task of integrated optics. One of the most efficient methods of fabrication of such microstructures is two-photon laser lithography. However, most polymers used in this technology have a relatively low quantum yi...
Saved in:
| Published in: | JETP letters Vol. 115; no. 5; pp. 261 - 266 |
|---|---|
| Main Authors: | , , , , |
| Format: | Journal Article |
| Language: | English |
| Published: |
Moscow
Pleiades Publishing
01-03-2022
Springer Nature B.V |
| Subjects: | |
| Online Access: | Get full text |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Abstract | Fabrication of active fluorescent microstructures with given parameters is an important task of integrated optics. One of the most efficient methods of fabrication of such microstructures is two-photon laser lithography. However, most polymers used in this technology have a relatively low quantum yield of fluorescence. In this work, the properties of microcavity structures obtained by the indicated method from hybrid polymers with addition of various dyes have been studied. The possibility of formation of high-quality microstructures from activated polymers, conservation of their luminescent properties after polymerization under intense laser irradiation, and reduction of the exposure of two-photon laser lithography by two orders of magnitude in the presence of Coumarin-1 dye has been demonstrated. The nonlinear optical microscopy study has shown that the spatial distribution of scattered fluorescence in microcavity structures based on the polymer with the dye corresponds to the excitation of cavity modes or whispering gallery modes. |
|---|---|
| AbstractList | Fabrication of active fluorescent microstructures with given parameters is an important task of integrated optics. One of the most efficient methods of fabrication of such microstructures is two-photon laser lithography. However, most polymers used in this technology have a relatively low quantum yield of fluorescence. In this work, the properties of microcavity structures obtained by the indicated method from hybrid polymers with addition of various dyes have been studied. The possibility of formation of high-quality microstructures from activated polymers, conservation of their luminescent properties after polymerization under intense laser irradiation, and reduction of the exposure of two-photon laser lithography by two orders of magnitude in the presence of Coumarin-1 dye has been demonstrated. The nonlinear optical microscopy study has shown that the spatial distribution of scattered fluorescence in microcavity structures based on the polymer with the dye corresponds to the excitation of cavity modes or whispering gallery modes. |
| Author | Soria, S. Murzina, T. V. Mamonov, E. A. Mitetelo, N. V. Maydykovskiy, A. I. |
| Author_xml | – sequence: 1 givenname: A. I. surname: Maydykovskiy fullname: Maydykovskiy, A. I. organization: Faculty of Physics, Moscow State University – sequence: 2 givenname: E. A. surname: Mamonov fullname: Mamonov, E. A. organization: Faculty of Physics, Moscow State University, Faculty of Physics, National Research University Higher School of Economics – sequence: 3 givenname: N. V. surname: Mitetelo fullname: Mitetelo, N. V. organization: Faculty of Physics, Moscow State University – sequence: 4 givenname: S. surname: Soria fullname: Soria, S. organization: CNR-IFAC, Istituto di Fisica Applicata “Nello Carrara,” Consiglio Nazionale delle Ricerche – sequence: 5 givenname: T. V. surname: Murzina fullname: Murzina, T. V. email: murzina@mail.ru organization: Faculty of Physics, Moscow State University |
| BookMark | eNp1kEtLw0AUhQepYFv9Ae4CrqN33pOFi1J8QUShdR0mk0mbopk6M6nk35tQwYW4uovznXMuZ4YmrWstQpcYrjGm7GYFQDAVDAjBAJjDCZpiyCAVTMkJmo5yOupnaBbCbkCwonKKbtdfLn3duujaJNfB-iRv4tZtvN5v-8TVycLE5mCT58Z4Z_ShiX2yir4zsfM2nKPTWr8He_Fz5-jt_m69fEzzl4en5SJPDVFZTClwW1JZEWlViUuquORlJVRtaq61qCRmUmuGJdcglGK0ZroEJSSUggMYOkdXx9y9d5-dDbHYuc63Q2VBhGBMKpplA4WP1PBqCN7Wxd43H9r3BYZiXKn4s9LgIUdPGNh2Y_1v8v-mbzOaaSc |
| CitedBy_id | crossref_primary_10_1134_S0021364022602743 crossref_primary_10_55959_MSU0579_9392_78_2320401 crossref_primary_10_1039_D4LP00141A crossref_primary_10_37188_lam_2023_032 crossref_primary_10_1002_adfm_202214211 crossref_primary_10_31857_S1234567823010044 |
| Cites_doi | 10.1364/OE.27.008639 10.1155/2008/493059 10.1364/OE.19.011451 10.1134/S0021364014090112 10.1063/1.4916886 10.1364/OME.416457 10.1364/OL.400620 10.1134/S0021364012090123 10.1038/s41598-017-09293-z 10.1364/OME.2.000942 10.1021/j100248a024 10.1134/S0021364020220038 10.1016/j.mattod.2017.06.004 10.1038/s41598-018-35301-x 10.1002/adom.201901317 10.3390/polym13121994 10.1002/adom.201600804 10.1134/S0021364021120122 10.1117/12.2043038 |
| ContentType | Journal Article |
| Copyright | The Author(s) 2022. ISSN 0021-3640, JETP Letters, 2022, Vol. 115, No. 5, pp. 261–266. © The Author(s), 2022. This article is an open access publication, corrected publication 2022. Russian Text © The Author(s), 2022, published in Pis’ma v Zhurnal Eksperimental’noi i Teoreticheskoi Fiziki, 2022, Vol. 115, No. 5, pp. 297–303. The Author(s) 2022. ISSN 0021-3640, JETP Letters, 2022, Vol. 115, No. 5, pp. 261–266. © The Author(s), 2022. This article is an open access publication, corrected publication 2022. Russian Text © The Author(s), 2022, published in Pis’ma v Zhurnal Eksperimental’noi i Teoreticheskoi Fiziki, 2022, Vol. 115, No. 5, pp. 297–303. This work is published under http://creativecommons.org/licenses/by/4.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License. |
| Copyright_xml | – notice: The Author(s) 2022. ISSN 0021-3640, JETP Letters, 2022, Vol. 115, No. 5, pp. 261–266. © The Author(s), 2022. This article is an open access publication, corrected publication 2022. Russian Text © The Author(s), 2022, published in Pis’ma v Zhurnal Eksperimental’noi i Teoreticheskoi Fiziki, 2022, Vol. 115, No. 5, pp. 297–303. – notice: The Author(s) 2022. ISSN 0021-3640, JETP Letters, 2022, Vol. 115, No. 5, pp. 261–266. © The Author(s), 2022. This article is an open access publication, corrected publication 2022. Russian Text © The Author(s), 2022, published in Pis’ma v Zhurnal Eksperimental’noi i Teoreticheskoi Fiziki, 2022, Vol. 115, No. 5, pp. 297–303. This work is published under http://creativecommons.org/licenses/by/4.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License. |
| DBID | C6C AAYXX CITATION |
| DOI | 10.1134/S0021364022100150 |
| DatabaseName | Springer Open Access CrossRef |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | CrossRef |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Physics |
| EISSN | 1090-6487 |
| EndPage | 266 |
| ExternalDocumentID | 10_1134_S0021364022100150 |
| GroupedDBID | -5F -5G -BR -DZ -EM -Y2 -~C -~X 06D 0R~ 0VY 199 1N0 2.D 29J 29~ 2J2 2JN 2JY 2KG 2KM 2LR 2VQ 2~H 30V 4.4 408 40D 40E 5GY 5VS 6NX 6TJ 78A 8TC 8UJ 8WZ 95- 95. 95~ 96X A6W AAAVM AABHQ AAFGU AAGAY AAHNG AAIAL AAJKR AANZL AAPBV AARHV AARTL AATNV AATVU AAUYE AAWCG AAYFA AAYIU AAYQN AAYTO ABBBX ABDBF ABDZT ABECU ABEFU ABFGW ABFTV ABHLI ABHQN ABJNI ABJOX ABKAS ABKCH ABKTR ABMNI ABMQK ABNWP ABPTK ABQBU ABSXP ABTAH ABTEG ABTHY ABTKH ABTMW ABULA ABWNU ABXPI ACBMV ACBRV ACBXY ACBYP ACGFS ACHSB ACHXU ACIGE ACIPQ ACKNC ACMDZ ACMLO ACNCT ACOKC ACOMO ACTTH ACVWB ACWMK ADHHG ADHIR ADINQ ADKNI ADKPE ADMDM ADOXG ADRFC ADTPH ADURQ ADYFF ADZKW AEBTG AEFTE AEGAL AEGNC AEJHL AEJRE AEKMD AENEX AEOHA AEPYU AESTI AETLH AEVLU AEVTX AEXYK AFFNX AFGCZ AFLOW AFNRJ AFQWF AFWTZ AFZKB AGAYW AGDGC AGGBP AGJBK AGMZJ AGQMX AGWIL AGWZB AGYKE AHAVH AHBYD AHKAY AHSBF AHYZX AI. AIAKS AIIXL AILAN AIMYW AITGF AJBLW AJDOV AJRNO AKQUC ALMA_UNASSIGNED_HOLDINGS ALWAN AMKLP AMXSW AMYLF AMYQR AOCGG ARMRJ ASPBG AVWKF AXYYD AZFZN B-. B0M BA0 BDATZ BGNMA C6C CAG COF CS3 CSCUP DDRTE DNIVK DPUIP DU5 EAD EAP EAS EBLON EBS EIOEI EJD EMK EPL ESBYG EST ESX FEDTE FERAY FFXSO FIGPU FINBP FNLPD FRP FRRFC FSGXE FWDCC GGCAI GGRSB GJIRD GNWQR GQ6 GQ7 HF~ HG6 HMJXF HRMNR HVGLF HZ~ H~9 I-F IJ- IKXTQ ITM IWAJR I~X I~Z J-C JBSCW JZLTJ KOV LLZTM M4Y MA- MQGED N2Q N9A NB0 NPVJJ NQJWS NU0 O9- O93 O9J P2P P9T PF0 PT4 QOK QOS R89 R9I RNS ROL RSV S16 S1Z S27 S3B SAP SDH SHX SISQX SJYHP SNE SNPRN SNX SOHCF SOJ SPH SPISZ SRMVM SSLCW STPWE SZN T13 TN5 TSG TSV TUC TUS UG4 UNUBA UOJIU UPT UTJUX UZXMN VC2 VFIZW VH1 VOH W23 W48 WK8 XOL XU3 YLTOR YQT Z7R Z7X Z7Y Z83 Z88 Z92 ZMTXR ZY4 ~8M AACDK AAJBT AASML AAYXX AAYZH ABAKF ACDTI ACZOJ AEFQL AEMSY AFBBN AGRTI AIGIU CITATION H13 |
| ID | FETCH-LOGICAL-c289t-305eb37d27e8b1b38575bd68fcf5aa6d7147aa4175a068843f4ab08670b6500c3 |
| IEDL.DBID | AEJHL |
| ISSN | 0021-3640 |
| IngestDate | Mon Nov 04 11:39:50 EST 2024 Fri Nov 22 01:57:07 EST 2024 Sat Dec 16 12:05:53 EST 2023 |
| IsDoiOpenAccess | true |
| IsOpenAccess | true |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 5 |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c289t-305eb37d27e8b1b38575bd68fcf5aa6d7147aa4175a068843f4ab08670b6500c3 |
| OpenAccessLink | http://link.springer.com/10.1134/S0021364022100150 |
| PQID | 2664478399 |
| PQPubID | 2043678 |
| PageCount | 6 |
| ParticipantIDs | proquest_journals_2664478399 crossref_primary_10_1134_S0021364022100150 springer_journals_10_1134_S0021364022100150 |
| PublicationCentury | 2000 |
| PublicationDate | 2022-03-01 |
| PublicationDateYYYYMMDD | 2022-03-01 |
| PublicationDate_xml | – month: 03 year: 2022 text: 2022-03-01 day: 01 |
| PublicationDecade | 2020 |
| PublicationPlace | Moscow |
| PublicationPlace_xml | – name: Moscow – name: New York |
| PublicationTitle | JETP letters |
| PublicationTitleAbbrev | Jetp Lett |
| PublicationYear | 2022 |
| Publisher | Pleiades Publishing Springer Nature B.V |
| Publisher_xml | – name: Pleiades Publishing – name: Springer Nature B.V |
| References | KönigK.OstendorfA.Optically Induced Nanostructures: Biomedical and Technical Applications2015 CorreaD. S.De BoniL.OtukaA. J.TribuziV.MendoncaC. R.Two-Photon Polymerization Fabrication of Doped Microstructures2012LondonInTech G. Gruetzner, J. Klein, M. Vogler, and A. Schleunitz, in Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII, Ed. by G. von Freymann, W. V. Schoenfeld, and R. C. Rumpf, Proc. SPIE 8974, 19 (2014). GrossmannT.SchleedeS.HauserM.BeckT.ThielM.von FreymannG.MappesT.KaltH.Opt. Express2011191145110.1364/OE.19.0114512011OExpr..1911451G SharipovaM. I.BaluyanT. G.AbrashitovaK. A.KulaginG. E.PetrovA. K.ChizhovA. S.ShatalovaT. B.ChubichD.KolymaginD. A.VitukhnovskyA. G.BessonovV. O.FedyaninA. A.Opt. Mater. Express20211137110.1364/OME.4164572021OMExp..11..371S TomazioN. B.BoniL. D.MendoncaC. R.Sci. Rep.20177855910.1038/s41598-017-09293-z2017NatSR...7.8559T A. Ovsianikov, A. Gaidukeviciute, B. N. Chichkov, M. Oubaha, B. D. MacCraith, I. Sakellari, A. Giakoumaki, D. Gray, M. Vamvakaki, M. Farsari, and C. Fotakis, Laser Chem. 2008, 493059 (2008). PopovM.MamonovE.MiteteloN.ZhdanovaK.RaviJ.ChandrasekarR.MurzinaT.Opt. Lett.202045462210.1364/OL.4006202020OptL...45.4622P EmonsM.ObataK.BinhammerT.OvsianikovA.ChichkovB. N.MorgnerU.Opt. Mater. Express2012294210.1364/OME.2.0009422012OMExp...2..942E NguyenA. K.NarayanR. J.Mater. Today20172031410.1016/j.mattod.2017.06.004 OtukaA. J. G.TomazioN. B.PaulaK. T.MendonC. R.Polymers202113199410.3390/polym13121994 ShishkinI.SamusevK.RybinM.LimonovM. F.Kivshar’Yu. S.GaidukeviciuteA.KiyanR. V.ChichkovB. N.JETP Lett.20129545710.1134/S00213640120901232012JETPL..95..457S X. Zhou, Y. Hou, and J. Lin, AIP Adv. 5, 030701 (2015). V. V. Pradeep, N. Mitetelo, M. Annadhasan, M. Popov, E. Mamonov, T. Murzina, and R. Chandrasekar, Adv. Opt. Mater. 8, 1901317 (2020). ShishkinI. I.RybinM. V.SamusevK. B.LimonovM. F.KiyanR. V.ChichkovB. N.Kivshar’Yu. S.BelovP. A.JETP Lett.20149953110.1134/S00213640140901122014JETPL..99..531S JonesG.JacksonW. R.ChoiC. Y.BergmarkW. R.J. Phys. Chem.19858929410.1021/j100248a024 https://www.microresist.de/en/produkt/ormocomp/. TonkaevP.Kivshar’Yu.JETP Lett.202011261510.1134/S00213640202200382020JETPL.112..615T TromayerM.GruberP.RosspeintnerA.AjamiA.HusinskyW.PlasserF.GonzálezL.VautheyE.OvsianikovA.LiskaR.Sci. Rep.201881727310.1038/s41598-018-35301-x2018NatSR...817273T S. Butler, H. Jiang, J. Lin, and A. Neogi, Adv. Opt. Mater. 5, 1600804 (2017). VolkT. R.BodnarchukYa. V.GainutdinovR. V.KokhanchikL. S.ShandarovS. M.JETP Lett.202111376910.1134/S0021364021120122 LyubomirskiyM.KochF.AbrashitovaK. A.BessonovV. O.KokarevaN.PetrovA.SeibothF.WittwerF.KahntM.SeyrichM.FedyaninA. A.DavidC.SchroerC. G.Opt. Express201927863910.1364/OE.27.0086392019OExpr..27.8639L P. Tonkaev (3293_CR3) 2020; 112 (3293_CR1) 2015 I. Shishkin (3293_CR9) 2012; 95 N. B. Tomazio (3293_CR13) 2017; 7 T. R. Volk (3293_CR4) 2021; 113 M. Tromayer (3293_CR10) 2018; 8 T. Grossmann (3293_CR17) 2011; 19 M. Lyubomirskiy (3293_CR7) 2019; 27 M. I. Sharipova (3293_CR8) 2021; 11 A. J. G. Otuka (3293_CR5) 2021; 13 M. Emons (3293_CR11) 2012; 2 I. I. Shishkin (3293_CR2) 2014; 99 3293_CR20 3293_CR21 M. Popov (3293_CR22) 2020; 45 3293_CR12 3293_CR15 G. Jones (3293_CR18) 1985; 89 D. S. Correa (3293_CR14) 2012 3293_CR16 3293_CR19 A. K. Nguyen (3293_CR6) 2017; 20 |
| References_xml | – volume: 27 start-page: 8639 year: 2019 ident: 3293_CR7 publication-title: Opt. Express doi: 10.1364/OE.27.008639 contributor: fullname: M. Lyubomirskiy – ident: 3293_CR16 doi: 10.1155/2008/493059 – volume: 19 start-page: 11451 year: 2011 ident: 3293_CR17 publication-title: Opt. Express doi: 10.1364/OE.19.011451 contributor: fullname: T. Grossmann – ident: 3293_CR19 – volume: 99 start-page: 531 year: 2014 ident: 3293_CR2 publication-title: JETP Lett. doi: 10.1134/S0021364014090112 contributor: fullname: I. I. Shishkin – volume-title: Optically Induced Nanostructures: Biomedical and Technical Applications year: 2015 ident: 3293_CR1 – ident: 3293_CR12 doi: 10.1063/1.4916886 – volume-title: Two-Photon Polymerization Fabrication of Doped Microstructures year: 2012 ident: 3293_CR14 contributor: fullname: D. S. Correa – volume: 11 start-page: 371 year: 2021 ident: 3293_CR8 publication-title: Opt. Mater. Express doi: 10.1364/OME.416457 contributor: fullname: M. I. Sharipova – volume: 45 start-page: 4622 year: 2020 ident: 3293_CR22 publication-title: Opt. Lett. doi: 10.1364/OL.400620 contributor: fullname: M. Popov – volume: 95 start-page: 457 year: 2012 ident: 3293_CR9 publication-title: JETP Lett. doi: 10.1134/S0021364012090123 contributor: fullname: I. Shishkin – volume: 7 start-page: 8559 year: 2017 ident: 3293_CR13 publication-title: Sci. Rep. doi: 10.1038/s41598-017-09293-z contributor: fullname: N. B. Tomazio – volume: 2 start-page: 942 year: 2012 ident: 3293_CR11 publication-title: Opt. Mater. Express doi: 10.1364/OME.2.000942 contributor: fullname: M. Emons – volume: 89 start-page: 294 year: 1985 ident: 3293_CR18 publication-title: J. Phys. Chem. doi: 10.1021/j100248a024 contributor: fullname: G. Jones – volume: 112 start-page: 615 year: 2020 ident: 3293_CR3 publication-title: JETP Lett. doi: 10.1134/S0021364020220038 contributor: fullname: P. Tonkaev – volume: 20 start-page: 314 year: 2017 ident: 3293_CR6 publication-title: Mater. Today doi: 10.1016/j.mattod.2017.06.004 contributor: fullname: A. K. Nguyen – volume: 8 start-page: 17273 year: 2018 ident: 3293_CR10 publication-title: Sci. Rep. doi: 10.1038/s41598-018-35301-x contributor: fullname: M. Tromayer – ident: 3293_CR20 doi: 10.1002/adom.201901317 – volume: 13 start-page: 1994 year: 2021 ident: 3293_CR5 publication-title: Polymers doi: 10.3390/polym13121994 contributor: fullname: A. J. G. Otuka – ident: 3293_CR21 doi: 10.1002/adom.201600804 – volume: 113 start-page: 769 year: 2021 ident: 3293_CR4 publication-title: JETP Lett. doi: 10.1134/S0021364021120122 contributor: fullname: T. R. Volk – ident: 3293_CR15 doi: 10.1117/12.2043038 |
| SSID | ssj0011837 |
| Score | 2.3768325 |
| Snippet | Fabrication of active fluorescent microstructures with given parameters is an important task of integrated optics. One of the most efficient methods of... |
| SourceID | proquest crossref springer |
| SourceType | Aggregation Database Publisher |
| StartPage | 261 |
| SubjectTerms | Addition polymerization Atomic Biological and Medical Physics Biophysics Coumarin Dyes Fluorescence Integrated optics Lasers Lithography Microstructure Molecular Nonlinear optics Optical and Plasma Physics Optical microscopy Optical properties Optics and Laser Physics Particle and Nuclear Physics Photons Physics Physics and Astronomy Polymers Quantum Information Technology Solid State Physics Spatial distribution Spintronics Whispering gallery modes |
| Title | Two-Photon Laser Lithography of Active Microcavity Structures |
| URI | https://link.springer.com/article/10.1134/S0021364022100150 https://www.proquest.com/docview/2664478399 |
| Volume | 115 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://sdu.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LS8NAEB60RfDiW6xW2YMnZSXZbDfpwUOxLUWqCK3QnsK-giIkYlv8-87m0eLroKcckl3CMLvzfTuz3wCcMxbpRApNhYoU5QgQqLJCUBvpVtIWknvKnekORuH9JOr2nEwOWx5dpC9XVUYy36iLtiPcXellfiCQ7jDfK2h6HUNPC3273undDobL3AE6admo1aduQJnL_HGSz9FoBTG_ZEXzYNPf_s9v7sBWCS1Jp_CFXViz6R5s5CWeerYP1-P3jD48ZQj2yBBj1xsZPs-fSsVqkiWkk2995M6V6GnpekqQUa4uu0BKfgCP_d74ZkDL5glUI4eaU1zHyJNDw0IbKV8FrhOnMiJKdNKSUpjQ56GUHNGDdH1neJBwqZDfhJ5C0Obp4BBqaZbaIyABM4wb6StpnZaPcRJelrV5wkOjVbvVgIvKiPFroZER59wi4PE3ezSgWZk5LpfLLEaUwHFmBEsNuKzsunr962THf_r6BDaZu7yQV5A1oYYmtKewPjOLs9KH3HMynXY_AD3xva0 |
| link.rule.ids | 315,782,786,27933,27934,41073,42142,48344,48347,49649,49652,52153 |
| linkProvider | Springer Nature |
| linkToHtml | http://sdu.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV07T8MwELagFYKFN6JQwAMTyFLiuE4yMFRAaUVaITVIbJFfUVkaRFvx9zk7CRWvAeYkJ-t0tr8v9_gQOqc0UrnginAZScIAIBBpOCcmUp085oJ50v7T7Y_D0VN0c2vH5AR1L4yrdq9Tku6kLnVHmO3ppX7Age9Q3yt5epPFnEEoN7uD9K73kTyAKK2UWn1iP6iSmT8a-XwdLTHml7Sou216W_9a5zbarMAl7pbRsINWzHQXrbkiTzXbQ1fpW0EeJgXAPZzA7fWKk-f5pJpZjYscd93hh4e2SE8JqyqBx26-7AJI-T567N2m131SyScQBSxqTmAnA1MONQ1NJH0ZWC1OqXmUq7wjBNehz0IhGOAHYZVnWJAzIYHhhJ4E2Oap4AA1psXUHCIcUE2ZFr4Uxk7z0XaIl6Exy1molYw7LXRRezF7KadkZI5dBCz75o8Watd-zqoNM8sAJzCwDHCphS5rvy4f_2rs6E9vn6H1fjpMsmQwuj9GG9S2Mrh6sjZqgDvNCVqd6cVpFVDvyH6_6w |
| linkToPdf | http://sdu.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV1LS8NAEF60RfHiW6xW3YMnZbHZbDfpQaTYlqqxFFrBW9hHlnpJim3x7zubbCy-DuI5yRCG2cz3ZWa-Qeic0lAZwRXhMpSEAUAgMuGcJKFqmhYXrCHtP93-KBg8h52ulcm5KWdh8m73siRZzDRYlaZ0fjXVxu0gYXa-l3o-B-5DvUbB2asMiAwEerXdve9HH4UEiFi3tdUj9gFX2PzRyOfUtMSbX0qkeebpbf37nbfRpgOduF1EyQ5aSdJdtJY3f6rZHroev2VkOMkABuIIstorjl7mE6dljTOD2_lHET_a5j0l7LYJPMp1ZxdA1vfRU687vu0Tt1aBKGBXcwInHBh0oGmQhNKTvt3RKTUPjTJNIbgOPBYIwQBXCLuRhvmGCQnMJ2hIgHMN5R-gSpqlySHCPtWUaeFJkViVH23FvRLaYoYFWslWs4YuSo_G00I9I85Zh8_ib_6ooXrp89gdpFkM-IGBZYBRNXRZ-nh5-VdjR3-6-wytDzu9OLobPByjDWonHPI2szqqgDeTE7Q604tTF1vv_yvIrg |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Two-Photon+Laser+Lithography+of+Active+Microcavity+Structures&rft.jtitle=JETP+letters&rft.au=Maydykovskiy%2C+A.+I.&rft.au=Mamonov%2C+E.+A.&rft.au=Mitetelo%2C+N.+V.&rft.au=Soria%2C+S.&rft.date=2022-03-01&rft.pub=Pleiades+Publishing&rft.issn=0021-3640&rft.eissn=1090-6487&rft.volume=115&rft.issue=5&rft.spage=261&rft.epage=266&rft_id=info:doi/10.1134%2FS0021364022100150&rft.externalDocID=10_1134_S0021364022100150 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0021-3640&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0021-3640&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0021-3640&client=summon |