Design of a packaging-friendly double-topology RF MEMS switch for space applications

This article presents the results of the research, design and a series of manufacturing steps of an RF-MEMS switch to be used in space communication systems. Design and measurement results are discussed. Double-topology geometry for anodic bonding is presented.

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Published in:	Microsystem technologies : sensors, actuators, systems integration Vol. 25; no. 1; pp. 51 - 55
Main Authors:	Savin, Evgeny A., Kirtaev, Roman V., Zhukov, Andrey A., Didyk, Pavel I.
Format:	Journal Article
Language:	English
Published:	Berlin/Heidelberg Springer Berlin Heidelberg 09-01-2019
Subjects:	Electronics and Microelectronics Engineering Instrumentation Mechanical Engineering Nanotechnology Technical Paper
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Abstract	This article presents the results of the research, design and a series of manufacturing steps of an RF-MEMS switch to be used in space communication systems. Design and measurement results are discussed. Double-topology geometry for anodic bonding is presented.
AbstractList	This article presents the results of the research, design and a series of manufacturing steps of an RF-MEMS switch to be used in space communication systems. Design and measurement results are discussed. Double-topology geometry for anodic bonding is presented.
Author	Savin, Evgeny A. Kirtaev, Roman V. Zhukov, Andrey A. Didyk, Pavel I.
Author_xml	– sequence: 1 givenname: Evgeny A. orcidid: 0000-0001-5623-8737 surname: Savin fullname: Savin, Evgeny A. email: e.savin@btlabs.ru organization: Bazovye Tekhnologii, LLC – sequence: 2 givenname: Roman V. surname: Kirtaev fullname: Kirtaev, Roman V. organization: Moscow Institute of Physics and Technology – sequence: 3 givenname: Andrey A. surname: Zhukov fullname: Zhukov, Andrey A. organization: Russian Space Systems, JSC – sequence: 4 givenname: Pavel I. surname: Didyk fullname: Didyk, Pavel I. organization: Russian Space Systems, JSC
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References	Vaha-Haikkila (CR12) 2007; 17 Kingsley, Ponchak, Papapolymerou (CR7) 2008; 56 Iannacci (CR6) 2018 CR17 CR9 CR16 CR15 CR14 CR13 CR11 Quaranta (CR8) 2018; 24 Zhukov, Grebenyuk, Sagitov (CR18) 2017; 5 De Pasquale, Veijola, Somà (CR2) 2009; 20 Alagashev, Savin (CR1) 2017; 12 Giacomozzi (CR3) 2015; 21 Iannacci (CR5) 2003 Huang, Zhang (CR4) 2007; 134 Savin, Chadin, Kirtaev (CR10) 2017 AA Zhukov (3929_CR18) 2017; 5 T Vaha-Haikkila (3929_CR12) 2007; 17 N Kingsley (3929_CR7) 2008; 56 J Iannacci (3929_CR6) 2018 J Iannacci (3929_CR5) 2003 GK Alagashev (3929_CR1) 2017; 12 G De Pasquale (3929_CR2) 2009; 20 3929_CR13 3929_CR9 F Quaranta (3929_CR8) 2018; 24 EA Savin (3929_CR10) 2017 3929_CR11 F Giacomozzi (3929_CR3) 2015; 21 S Huang (3929_CR4) 2007; 134 3929_CR17 3929_CR16 3929_CR15 3929_CR14
References_xml	– volume: 20 start-page: 1 issue: 1 year: 2009 end-page: 20 ident: CR2 article-title: Modelling and validation of air damping in perforated gold and silicon MEMS plates publication-title: J Micromech Microeng contributor: fullname: Somà – volume: 5 start-page: 29 year: 2017 end-page: 36 ident: CR18 article-title: Diffraction control method of the via micro-holes in the precise devises publication-title: Devices contributor: fullname: Sagitov – volume: 12 start-page: 5169 issue: 15 year: 2017 end-page: 5172 ident: CR1 article-title: Development of RF MEMS cantilever beam to maximize capacitance in an activated state publication-title: Int J Appl Eng Res contributor: fullname: Savin – ident: CR14 – ident: CR15 – ident: CR16 – volume: 56 start-page: 108 issue: 1 year: 2008 end-page: 118 ident: CR7 article-title: Reconfigurable RF MEMS phased array antenna integrated within a liquid crystal polymer (LCP) system-on-package publication-title: IEEE Trans Antennas Propag doi: 10.1109/TAP.2007.913151 contributor: fullname: Papapolymerou – ident: CR17 – ident: CR13 – volume: 24 start-page: 575 issue: 1 year: 2018 end-page: 585 ident: CR8 article-title: Wafer-level micropackaging in thin film technology for RF MEMS applications publication-title: Microsyst Technol doi: 10.1007/s00542-017-3583-6 contributor: fullname: Quaranta – ident: CR11 – ident: CR9 – year: 2003 ident: CR5 publication-title: Practical guide to RF-MEMS contributor: fullname: Iannacci – year: 2017 ident: CR10 article-title: Design and manufacturing of X-band RF MEMS switches publication-title: Microsyst Technol contributor: fullname: Kirtaev – volume: 17 start-page: 265 issue: 3 year: 2007 end-page: 278 ident: CR12 article-title: RF MEMS impedance tuners for 6–24 GHz applications publication-title: Int J RF Microw Comput Aided Eng doi: 10.1002/mmce.20220 contributor: fullname: Vaha-Haikkila – volume: 21 start-page: 1941 issue: 9 year: 2015 end-page: 1948 ident: CR3 article-title: RF-MEMS packaging by using quartz caps and epoxy polymers publication-title: Microsyst Technol doi: 10.1007/s00542-014-2256-y contributor: fullname: Giacomozzi – year: 2018 ident: CR6 article-title: Surfing the hype curve of RF-MEMS passive components: towards the 5th generation (5G) of mobile networks publication-title: J Microsyst Technol contributor: fullname: Iannacci – volume: 134 start-page: 177 issue: 1 year: 2007 end-page: 185 ident: CR4 article-title: Gradient residual stress induced elastic deformation of multilayer MEMS structures publication-title: Sens Actuators A doi: 10.1016/j.sna.2006.05.026 contributor: fullname: Zhang – ident: 3929_CR13 – volume: 134 start-page: 177 issue: 1 year: 2007 ident: 3929_CR4 publication-title: Sens Actuators A doi: 10.1016/j.sna.2006.05.026 contributor: fullname: S Huang – ident: 3929_CR9 – ident: 3929_CR14 – ident: 3929_CR15 – ident: 3929_CR11 – volume-title: Practical guide to RF-MEMS year: 2003 ident: 3929_CR5 contributor: fullname: J Iannacci – volume: 12 start-page: 5169 issue: 15 year: 2017 ident: 3929_CR1 publication-title: Int J Appl Eng Res contributor: fullname: GK Alagashev – volume: 5 start-page: 29 year: 2017 ident: 3929_CR18 publication-title: Devices contributor: fullname: AA Zhukov – volume: 24 start-page: 575 issue: 1 year: 2018 ident: 3929_CR8 publication-title: Microsyst Technol doi: 10.1007/s00542-017-3583-6 contributor: fullname: F Quaranta – year: 2018 ident: 3929_CR6 publication-title: J Microsyst Technol doi: 10.1007/s00542-018-3718-4 contributor: fullname: J Iannacci – volume: 17 start-page: 265 issue: 3 year: 2007 ident: 3929_CR12 publication-title: Int J RF Microw Comput Aided Eng doi: 10.1002/mmce.20220 contributor: fullname: T Vaha-Haikkila – year: 2017 ident: 3929_CR10 publication-title: Microsyst Technol doi: 10.1007/s00542-017-3629-9 contributor: fullname: EA Savin – volume: 20 start-page: 1 issue: 1 year: 2009 ident: 3929_CR2 publication-title: J Micromech Microeng contributor: fullname: G De Pasquale – volume: 56 start-page: 108 issue: 1 year: 2008 ident: 3929_CR7 publication-title: IEEE Trans Antennas Propag doi: 10.1109/TAP.2007.913151 contributor: fullname: N Kingsley – ident: 3929_CR17 – ident: 3929_CR16 – volume: 21 start-page: 1941 issue: 9 year: 2015 ident: 3929_CR3 publication-title: Microsyst Technol doi: 10.1007/s00542-014-2256-y contributor: fullname: F Giacomozzi
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Title	Design of a packaging-friendly double-topology RF MEMS switch for space applications
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