Micro-machined three-dimensional micro-optics for integrated free-space optical system

• Published in: IEEE photonics technology letters Vol. 6; no. 12; pp. 1445 - 1447
• Main Authors: Lin, L.Y., Lee, S.S., Pister, K.S.J., Wu, M.C.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01-12-1994; Institute of Electrical and Electronics Engineers
• Subjects: Exact sciences and technology; Fresnel reflection; Fundamental areas of phenomenology (including applications); Integrated optics; Lenses; Lenses, prisms and mirrors; Lithography; Micromachining; Mirrors; Optical arrays; Optical elements, devices, and systems; Optical interconnections; Optics; Physics; Space technology; Springs; Fabrication; Integrated optics; Beam splitting; Diffractive optics; Experimental study; Optical lens; Microoptics
• ISSN: 1041-1135; 1941-0174
• DOI: 10.1109/68.392216

Novel, integrable three-dimensional micro-optical elements have been realized by surface micromachining technology. Rotatable mirrors, lenses and beam-splitters standing perpendicular to the substrate are demonstrated. The optical elements are precisely held at 90/spl deg/ angle to the substrate by side latches. The Si substrate serves as a "micro-optical bench" on which monolithic micro-optical systems consisting of movable and static micro-mirrors, lenses and other components are constructed. The optical system is pre-aligned by photolithography. This technology offers a new approach to free-space integrated optics and low-cost optical packaging.< >