Diffusion of reactive ion beam etched polymers
The diffusion of deuterated polystyrene (d-PS) in a polystyrene matrix was used to probe the damage to the polymer surface caused by reactive ion beam etching (RIBE). Diffusion was seen to be hindered in a d-PS film treated by RIBE, an immobilization apparently due to crosslinking of the surface mon...
Saved in:
| Published in: | Applied physics letters Vol. 52; no. 2; pp. 101 - 102 |
|---|---|
| Main Authors: | , , , |
| Format: | Journal Article |
| Language: | English |
| Published: |
Melville, NY
American Institute of Physics
11-01-1988
|
| Subjects: | |
| Online Access: | Get full text |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Abstract | The diffusion of deuterated polystyrene (d-PS) in a polystyrene matrix was used to probe the damage to the polymer surface caused by reactive ion beam etching (RIBE). Diffusion was seen to be hindered in a d-PS film treated by RIBE, an immobilization apparently due to crosslinking of the surface monolayer of the polymer sample. |
|---|---|
| AbstractList | The diffusion of deuterated polystyrene (d-PS) in a polystyrene matrix was used to probe the damage to the polymer surface caused by reactive ion beam etching (RIBE). Diffusion was seen to be hindered in a d-PS film treated by RIBE, an immobilization apparently due to crosslinking of the surface monolayer of the polymer sample. |
| Author | VANDERLINDE, W. E TEAD, S. F RUOFF, A. L KRAMER, E. J |
| Author_xml | – sequence: 1 givenname: S. F surname: TEAD fullname: TEAD, S. F organization: Cornell univ., dep. materials sci. eng., Ithaca NY 14853, United States – sequence: 2 givenname: W. E surname: VANDERLINDE fullname: VANDERLINDE, W. E organization: Cornell univ., dep. materials sci. eng., Ithaca NY 14853, United States – sequence: 3 givenname: A. L surname: RUOFF fullname: RUOFF, A. L organization: Cornell univ., dep. materials sci. eng., Ithaca NY 14853, United States – sequence: 4 givenname: E. J surname: KRAMER fullname: KRAMER, E. J organization: Cornell univ., dep. materials sci. eng., Ithaca NY 14853, United States |
| BackLink | http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=7848766$$DView record in Pascal Francis |
| BookMark | eNo9kM1KAzEURoNUsK3iK8xCdDU1N5lkkqXUXyi40XVI79zgyMykJlOhb2-1xdXHgcNZfDM2GeJAjF0CXwDX8hYW1nItTtgUeF2XEsBM2JRzLkttFZyxWc6fe1RCyilb3LchbHMbhyKGIpHHsf2m4pfX5PuCRvygptjEbtdTyufsNPgu08Vx5-z98eFt-VyuXp9elnerEoVRY7kW0nKy2HjRIHpeB1lZXDdagJaVsN4qoysMSjSSIKA3SoIVPuiaIwSQc3Z96G5S_NpSHl3fZqSu8wPFbXaiMooDVHvx5iBiijknCm6T2t6nnQPufv9w4P7-2JtXx6TP6LuQ_IBt_tdrU5laa_kDlRRfDA |
| CODEN | APPLAB |
| CitedBy_id | crossref_primary_10_1016_0032_3861_92_90088_E crossref_primary_10_1063_1_346433 crossref_primary_10_1063_1_350966 crossref_primary_10_1016_0168_583X_94_96262_6 crossref_primary_10_1063_1_354983 crossref_primary_10_1116_1_3532949 |
| Cites_doi | 10.1002/pol.1977.170151004 10.1146/annurev.ms.13.080183.002213 10.1063/1.1660019 10.1002/pol.1966.110040309 10.1007/BFb0038532 10.1002/app.1967.070110809 10.1063/1.95456 10.1016/0014-3057(74)90142-6 10.1021/ma00155a018 10.1103/PhysRev.124.128 10.1116/1.582994 10.1063/1.328526 |
| ContentType | Journal Article |
| Copyright | 1988 INIST-CNRS |
| Copyright_xml | – notice: 1988 INIST-CNRS |
| DBID | IQODW AAYXX CITATION 7SP 7U5 8FD L7M |
| DOI | 10.1063/1.99062 |
| DatabaseName | Pascal-Francis CrossRef Electronics & Communications Abstracts Solid State and Superconductivity Abstracts Technology Research Database Advanced Technologies Database with Aerospace |
| DatabaseTitle | CrossRef Solid State and Superconductivity Abstracts Technology Research Database Advanced Technologies Database with Aerospace Electronics & Communications Abstracts |
| DatabaseTitleList | CrossRef Solid State and Superconductivity Abstracts |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Applied Sciences Engineering Physics |
| EISSN | 1077-3118 |
| EndPage | 102 |
| ExternalDocumentID | 10_1063_1_99062 7848766 |
| GroupedDBID | -DZ -~X .DC 0ZJ 186 1UP 2-P 23M 2WC 3O- 4.4 41~ 53G 5GY 5VS 6J9 6TJ A9. AABDS AAEUA AAGZG AAPUP AAYIH AAYJJ ABFTF ABPTK ABRJW ABTAH ABZEH ACBEA ACBRY ACGFO ACGFS ACKIV ACNCT ACZLF ADCTM AEGXH AENEX AETEA AFHCQ AGIHO AGKCL AGLKD AI. AIAGR ALEPV ALMA_UNASSIGNED_HOLDINGS AQWKA ATXIE AWQPM BPZLN CS3 D0L EBS EJD ESX F.2 F20 F5P FDOHQ FFFMQ HAM IQODW M6X M71 M73 MVM N9A NEJ NEUPN NPSNA O-B OHT P2P RDFOP RIP RNS ROL RQS SJN T9H TAE TN5 UCJ UE8 UPT UQL VH1 VOH VQP WH7 XFK XJE XJT XOL YYP YZZ ZY4 ~02 AAYXX ABJNI AEJMO AGMXG CITATION 7SP 7U5 8FD L7M |
| ID | FETCH-LOGICAL-c285t-b2390e9cda2dcca07f349cbd62163429a95864cf52d3e1fca853192af670c1f13 |
| ISSN | 0003-6951 |
| IngestDate | Fri Oct 25 01:19:32 EDT 2024 Thu Sep 26 15:41:08 EDT 2024 Sun Oct 29 17:06:58 EDT 2023 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 2 |
| Keywords | Thickness Reactive ion etching Labelled polymer Crosslinking Styrene polymer Diffusion Bilayer |
| Language | English |
| License | CC BY 4.0 |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-c285t-b2390e9cda2dcca07f349cbd62163429a95864cf52d3e1fca853192af670c1f13 |
| Notes | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
| PQID | 24850114 |
| PQPubID | 23500 |
| PageCount | 2 |
| ParticipantIDs | proquest_miscellaneous_24850114 crossref_primary_10_1063_1_99062 pascalfrancis_primary_7848766 |
| PublicationCentury | 1900 |
| PublicationDate | 1988-01-11 |
| PublicationDateYYYYMMDD | 1988-01-11 |
| PublicationDate_xml | – month: 01 year: 1988 text: 1988-01-11 day: 11 |
| PublicationDecade | 1980 |
| PublicationPlace | Melville, NY |
| PublicationPlace_xml | – name: Melville, NY |
| PublicationTitle | Applied physics letters |
| PublicationYear | 1988 |
| Publisher | American Institute of Physics |
| Publisher_xml | – name: American Institute of Physics |
| References | (2024020222001950100_r3) 1966; 4 (2024020222001950100_r5) 1977; 15 (2024020222001950100_r13) 1961; 124 (2024020222001950100_r8) 1982; 47 (2024020222001950100_r11) 1984; 45 2024020222001950100_r16 (2024020222001950100_r17) 1987; 32 (2024020222001950100_r15) 1974; 10 (2024020222001950100_r9) 1986; 19 (2024020222001950100_r12) 1971; 42 (2024020222001950100_r6) 1981; 15 (2024020222001950100_r7) 1986; 136 (2024020222001950100_r2) 1985; 3 (2024020222001950100_r19) 1981; 16 2024020222001950100_r1 (2024020222001950100_r10) 1983; 13 (2024020222001950100_r4) 1967; 11 (2024020222001950100_r14) 1973; 245 (2024020222001950100_r18) 1981; 52 |
| References_xml | – volume: 15 start-page: 2321 year: 1977 ident: 2024020222001950100_r5 publication-title: J. Polym. Sci. Polym. Chem. Ed. doi: 10.1002/pol.1977.170151004 – volume: 13 start-page: 413 year: 1983 ident: 2024020222001950100_r10 publication-title: Annu. Rev. Mater. Sci. doi: 10.1146/annurev.ms.13.080183.002213 – volume: 42 start-page: 5837 year: 1971 ident: 2024020222001950100_r12 publication-title: J. Appl. Phys. doi: 10.1063/1.1660019 – ident: 2024020222001950100_r16 – ident: 2024020222001950100_r1 – volume: 4 start-page: 203 year: 1966 ident: 2024020222001950100_r3 publication-title: J. Polym. Sci. B doi: 10.1002/pol.1966.110040309 – volume: 47 start-page: 67 year: 1982 ident: 2024020222001950100_r8 publication-title: Adv. Polym. Sci. doi: 10.1007/BFb0038532 – volume: 11 start-page: 1461 year: 1967 ident: 2024020222001950100_r4 publication-title: J. Appl. Polym. Sci. doi: 10.1002/app.1967.070110809 – volume: 136 start-page: 1147 year: 1986 ident: 2024020222001950100_r7 publication-title: Thin Solid Films – volume: 16 start-page: 204 year: 1981 ident: 2024020222001950100_r19 publication-title: J. Mater. Sci. – volume: 45 start-page: 957 year: 1984 ident: 2024020222001950100_r11 publication-title: Appl. Phys. Lett. doi: 10.1063/1.95456 – volume: 32 start-page: 661 year: 1987 ident: 2024020222001950100_r17 publication-title: Bull. Am. Phys. Soc. – volume: 245 start-page: 13 year: 1973 ident: 2024020222001950100_r14 publication-title: Nature (London) – volume: 10 start-page: 861 year: 1974 ident: 2024020222001950100_r15 publication-title: Eur. Polym. J. doi: 10.1016/0014-3057(74)90142-6 – volume: 15 start-page: 7 year: 1981 ident: 2024020222001950100_r6 publication-title: Polymer – volume: 19 start-page: 105 year: 1986 ident: 2024020222001950100_r9 publication-title: Macromolecules doi: 10.1021/ma00155a018 – volume: 124 start-page: 128 year: 1961 ident: 2024020222001950100_r13 publication-title: Phys. Rev. doi: 10.1103/PhysRev.124.128 – volume: 3 start-page: 1362 year: 1985 ident: 2024020222001950100_r2 publication-title: J. Vac. Sci. Technol. B doi: 10.1116/1.582994 – volume: 52 start-page: 5953 year: 1981 ident: 2024020222001950100_r18 publication-title: J. Appl. Phys. doi: 10.1063/1.328526 |
| SSID | ssj0005233 |
| Score | 1.3948627 |
| Snippet | The diffusion of deuterated polystyrene (d-PS) in a polystyrene matrix was used to probe the damage to the polymer surface caused by reactive ion beam etching... |
| SourceID | proquest crossref pascalfrancis |
| SourceType | Aggregation Database Index Database |
| StartPage | 101 |
| SubjectTerms | Applied sciences Exact sciences and technology Miscellaneous Organic polymers Physicochemistry of polymers Properties and characterization |
| Title | Diffusion of reactive ion beam etched polymers |
| URI | https://search.proquest.com/docview/24850114 |
| Volume | 52 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://sdu.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV3fa9UwFA5uQ1BkbFPx6qZ98O3SeZu0afIo7o6h4zp2O9lbSfMDhO3esa4P--89J0l775igPvhSmlBCyZd-_U5yfhDyUYkGzARZpoaZPM0l2KxNUfBUC15kQhrV-FoEJ_NydimOpvm0r5ANVv_Q91-Rhj7AGiNn_wHtYVDogHvAHK6AOlz_Cvejn851bZSBoAg9n42x3Vh1PfYoGazNcH8dnd-HJLRRkIbNjnZ85SN9Bs1dxdUwXzkD__ChMVeYcdH76q3CGs67ZUz3OB52l7-hH1iIromHUSaE3wl0dEsjG_YMylIuY5LYyKAFXVspdI0Os7hRYWOL_pa0QSXh_sGhxJzJq_9SfxY_-14fX5ye1tX0stogWxQYBX03519na748jPWlEfHlQnQ0DvwpDvtAdry4US18AS6ULnn0F_bSotoh29EmSD4HMHfJE7vYI8_XMkXukadnAZSX5HAAOFm6pAc4wTYCnASAkx7gV-TieFp9OUlj0YtUU1HcpQ1lcmKlNooa-LompWO51I3hFJQziAclC8Fz7QpqmM2cVgJZlCrHy4nOXMZek83FcmHfkMRAv5RGuNI1oDuZUrbUVCvLCy20Lkck6eekvgm5TWrvk8BZndV-2kbk4MFcDc-VAixdzkfkQz93NfASHjaphV12bY2p8tDYfvvHJ96RZ6uVtk827247e0A2WtO99yj_ArK6U44 |
| link.rule.ids | 315,782,786,27935,27936 |
| linkProvider | Multiple Vendors |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Diffusion+of+reactive+ion+beam+etched+polymers&rft.jtitle=Applied+physics+letters&rft.au=Tead%2C+S+F&rft.au=Vanderlinde%2C+W+E&rft.au=Ruoff%2C+A+L&rft.au=Kramer%2C+E+J&rft.date=1988-01-11&rft.issn=0003-6951&rft.volume=52&rft.issue=2&rft.spage=101&rft.epage=102&rft_id=info:doi/10.1063%2F1.99062&rft.externalDBID=NO_FULL_TEXT |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0003-6951&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0003-6951&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0003-6951&client=summon |