Energetic oxygen ions in ZrO2 deposition by reactive sputtering of Zr

Energetic oxygen ions in ZrO2 deposition by reactive sputtering of Zr

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Bibliographic Details
Published in:Vacuum Vol. 66; no. 3-4; pp. 279 - 284
Main Authors: TOMINAGA, Kikuo, KIKUMA, Takuya, KUSAKA, Kazuya, HANABUSA, Takao
Format: Conference Proceeding Journal Article
Language:English
Published: Oxford Elsevier 19-08-2002
Subjects:
Cross-disciplinary physics: materials science; rheology
Deposition by sputtering
Exact sciences and technology
Materials science
Methods of deposition of films and coatings; film growth and epitaxy
Oxidation
Physics
Surface treatments
Oxygen
Films
Transition element compounds
Surfaces
Oxides
Crystal growth from vapors
Energetic state
Experimental study
Oxidizing atmosphere
Gas mixtures
Degradation
Negative ions
Zirconium
Zirconium oxides
Oxidation
Reactive sputtering
Oxygen ions
Argon
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Description
ISSN:0042-207X
1879-2715
DOI:10.1016/S0042-207X(02)00155-0