A unified global model accompanied with a voltage and current sensor for low-pressure capacitively coupled RF discharge

A global model (GM) assumes ion energy ( ε ) on the electrode equals the time-averaged sheath voltage ( V sh t t ). However, using particle-in-cell simulation, we found that ε differs from V sh t t . We propose a unified global model (UGM) that calculates ε and collisional energy losses of ions by e...

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Bibliographic Details

Published in:	Applied physics express Vol. 17; no. 9; pp. 96001 - 96005
Main Authors:	Seong, Inho, Kim, Sijun, Lee, Woobeen, Lee, Youngseok, Cho, Chulhee, Jeong, Wonnyoung, Choi, Minsu, Choi, Byeongyeop, Seo, Huichan, Song, Sangheon, You, Shinjae
Format:	Journal Article
Language:	English
Published:	IOP Publishing 01-09-2024
Subjects:	global model plasma circuit model plasma model sheath model unified global model
Online Access:	Get full text
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