A unified global model accompanied with a voltage and current sensor for low-pressure capacitively coupled RF discharge

• Published in: Applied physics express Vol. 17; no. 9; pp. 96001 - 96005
• Main Authors: Seong, Inho, Kim, Sijun, Lee, Woobeen, Lee, Youngseok, Cho, Chulhee, Jeong, Wonnyoung, Choi, Minsu, Choi, Byeongyeop, Seo, Huichan, Song, Sangheon, You, Shinjae
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01-09-2024
• Subjects: global model; plasma circuit model; plasma model; sheath model; unified global model
• ISSN: 1882-0778; 1882-0786
• DOI: 10.35848/1882-0786/ad7667

A global model (GM) assumes ion energy ( ε ) on the electrode equals the time-averaged sheath voltage ( V sh t t ). However, using particle-in-cell simulation, we found that ε differs from V sh t t . We propose a unified global model (UGM) that calculates ε and collisional energy losses of ions by employing plasma circuit and sheath models, accompanied by a voltage and current sensor. We compared the results of the UGM with the experimental measurements and the results revealed that UGM is closer to the experiment than GM. UGM shows a linear relationship with the experiment, indicating that the UGM is applicable for plasma monitoring.