Morphological Properties of Nanocrystalline Silicon from p‐Type Bulk Silicon

Morphological Properties of Nanocrystalline Silicon from p‐Type Bulk Silicon

In this paper, the topography properties as layer thickness, porosity, and shape are studied for porous silicon prepared by using electro‐chemical etching method from p‐type bulk silicon like one side mirror with hydrofluoric acid (39%–43%) and ethanol (99.9%) (2:1), the etching time is (2, 4, 6, 8,...

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Bibliographic Details
Published in:Macromolecular symposia. Vol. 401; no. 1
Main Authors: Al‐Kadumi, Ahmed K., AL‐Baghdadi, M.
Format: Journal Article
Language:English
Published: Weinheim Wiley Subscription Services, Inc 01-02-2022
Subjects:
Chemical etching
Etching
Ethanol
Hydrofluoric acid
layer thickness
nanocrystalline bulk silicon
nanosilicon
Porosity
Porous silicon
Rapid prototyping
Silicon
Thickness
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Summary:In this paper, the topography properties as layer thickness, porosity, and shape are studied for porous silicon prepared by using electro‐chemical etching method from p‐type bulk silicon like one side mirror with hydrofluoric acid (39%–43%) and ethanol (99.9%) (2:1), the etching time is (2, 4, 6, 8, and 10) min, with potential (6 V DC), the porosity and layer thickness can determine by using gravimetric method and SEM image to study the comparison between the image for different etching time.
ISSN:1022-1360
1521-3900
DOI:10.1002/masy.202100306