Fabrication of Superconducting Qubits With Al Trilayer Josephson Junctions

To implement a large-scale integration of superconducting quantum bits (qubits), we have investigated a process of fabricating submicrometer Al/AlOx/Al trilayer Josephson junctions. Moreover, on the basis of this process, we developed a means of fabricating different kinds of superconducting qubits....

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Bibliographic Details

Published in:	IEEE transactions on applied superconductivity Vol. 25; no. 3; pp. 1 - 5
Main Authors:	Satoh, T., Noguchi, Y., Yamagishi, M., Nagasawa, S., Hinode, K., Hidaka, M., Maezawa, M., Horikawa, T.
Format:	Journal Article
Language:	English
Published:	IEEE 01-06-2015
Subjects:	CMP planarization Etching Fabrication Josephson junction fabrication Josephson junctions Junctions Planarization Resists superconducting qubit trilayer geometry Wires CMP planarization Josephson junction fabrication trilayer geometry superconducting qubit
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