Refractive index changes in a GaAs multiple quantum well structure produced by impurity-induced disordering using boron and fluorine
The effect of boron and fluorine impurity-induced disordering on the refractive index of AlxGa1−xAs multiple quantum well waveguides has been studied experimentally using a grating coupler formed in low-index material. Substantial changes ≳1% in the refractive index, were obtained in partially disor...
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Published in: | Applied physics letters Vol. 58; no. 13; pp. 1398 - 1400 |
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Main Authors: | , , , |
Format: | Journal Article |
Language: | English |
Published: |
Melville, NY
American Institute of Physics
01-04-1991
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Subjects: | |
Online Access: | Get full text |
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Summary: | The effect of boron and fluorine impurity-induced disordering on the refractive index of AlxGa1−xAs multiple quantum well waveguides has been studied experimentally using a grating coupler formed in low-index material. Substantial changes ≳1% in the refractive index, were obtained in partially disordered material over the measured wavelength range. Fluorine was found to produce larger changes than boron for similar annealing conditions. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.104320 |