Dislocation-induced photoluminescence in silicon crystals of various impurity composition
The effect of oxygen on the dislocation-induced photoluminescence (DPL) spectra at 4.2 K is studied in silicon crystals with different impurity compositions subjected to plastic deformation at temperatures above 1000°C. A strong effect of doping impurities on the DPL spectra is observed for concentr...
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Published in: | Physics of the solid state Vol. 45; no. 2; pp. 259 - 265 |
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Main Authors: | , |
Format: | Journal Article |
Language: | English |
Published: |
New York
Springer Nature B.V
01-02-2003
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Subjects: | |
Online Access: | Get full text |
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Summary: | The effect of oxygen on the dislocation-induced photoluminescence (DPL) spectra at 4.2 K is studied in silicon crystals with different impurity compositions subjected to plastic deformation at temperatures above 1000°C. A strong effect of doping impurities on the DPL spectra is observed for concentrations above 1016 cm−3. It is shown that the peculiarities of many DPL spectra in silicon can be explained by assuming that the D1 and D2 lines are associated with edge-type dislocation steps on glide dislocations. |
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ISSN: | 1063-7834 1090-6460 |
DOI: | 10.1134/1.1553528 |