Chemical vapor deposition of entropy-stabilized rock-salt type oxide thin films
•High-entropy oxide (MgCONiCuZn)O synthesized by CVD.•The entropy-stabilized phase is obtained after annealing at 950 °C.•The lattice parameters are close to those of the same material synthesized by solid state or PVD. Here we present the first synthesis of a multi-cationic oxide (MgCoNiCuZn)O by p...
Saved in:
| Published in: | Materials letters Vol. 337; p. 133955 |
|---|---|
| Main Authors: | , , , , |
| Format: | Journal Article |
| Language: | English |
| Published: |
Elsevier B.V
15-04-2023
|
| Subjects: | |
| Online Access: | Get full text |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Abstract | •High-entropy oxide (MgCONiCuZn)O synthesized by CVD.•The entropy-stabilized phase is obtained after annealing at 950 °C.•The lattice parameters are close to those of the same material synthesized by solid state or PVD.
Here we present the first synthesis of a multi-cationic oxide (MgCoNiCuZn)O by pulsed liquid injection chemical vapor deposition. The synthesis is performed between 400 °C and 550 °C from five metal–organic precursors simultaneously solubilized in dimethoxyethane (DME). The microstructure of the material was studied using HRTEM with HAADF, SEM, EDS, XPS and XRD before and after annealing. |
|---|---|
| AbstractList | •High-entropy oxide (MgCONiCuZn)O synthesized by CVD.•The entropy-stabilized phase is obtained after annealing at 950 °C.•The lattice parameters are close to those of the same material synthesized by solid state or PVD.
Here we present the first synthesis of a multi-cationic oxide (MgCoNiCuZn)O by pulsed liquid injection chemical vapor deposition. The synthesis is performed between 400 °C and 550 °C from five metal–organic precursors simultaneously solubilized in dimethoxyethane (DME). The microstructure of the material was studied using HRTEM with HAADF, SEM, EDS, XPS and XRD before and after annealing. |
| ArticleNumber | 133955 |
| Author | Raison, Antoine Wang, Wu Prud'homme, Nathalie Dragoe, Diana Dragoe, Nita |
| Author_xml | – sequence: 1 givenname: Antoine orcidid: 0000-0003-1590-7732 surname: Raison fullname: Raison, Antoine organization: Université Paris-Saclay, ICMMO, UMR 8182 CNRS, 91405 Orsay, France – sequence: 2 givenname: Nathalie surname: Prud'homme fullname: Prud'homme, Nathalie organization: Université Paris-Saclay, ICMMO, UMR 8182 CNRS, 91405 Orsay, France – sequence: 3 givenname: Wu surname: Wang fullname: Wang, Wu organization: Southern University of Science and Technology, Department of Physics, Shenzhen 518055, China – sequence: 4 givenname: Diana orcidid: 0000-0002-8536-1205 surname: Dragoe fullname: Dragoe, Diana organization: Université Paris-Saclay, ICMMO, UMR 8182 CNRS, 91405 Orsay, France – sequence: 5 givenname: Nita orcidid: 0000-0002-5142-9021 surname: Dragoe fullname: Dragoe, Nita email: nita.dragoe@universite-paris-saclay.fr organization: Université Paris-Saclay, ICMMO, UMR 8182 CNRS, 91405 Orsay, France |
| BookMark | eNp9kN9KwzAchYMouE3fwIu8QGvSJEtzI8jwHwx2o-BdSJNfWWbblCQM59PbUa-9OjfnOxy-JbocwgAI3VFSUkLX94eyN7mDXFakYiVlTAlxgRa0lqzgSqpLtJhqshBSfl6jZUoHQghXhC_QbrOH3lvT4aMZQ8QOxpB89mHAocUw5BjGU5GyaXznf8DhGOxXkUyXcT6NgMO3d4Dz3g-49V2fbtBVa7oEt3-5Qh_PT--b12K7e3nbPG4LW7F1Luq6FQwME1xRRxopKiqFYqSyYJqGmXrdcCeUdJwRxa0hQJ1VDZ8Q2fKWsRXi866NIaUIrR6j7008aUr0WYo-6FmKPkvRs5QJe5gxmL4dPUSdrIfBgvMRbNYu-P8HfgHxNm_g |
| CitedBy_id | crossref_primary_10_3389_frcdi_2024_1417527 |
| Cites_doi | 10.1016/0022-1902(67)80008-3 10.1063/1.5091787 10.1002/adma.201805004 10.1038/s41598-017-13810-5 10.1016/j.surfcoat.2012.12.017 10.1016/j.tsf.2007.03.089 10.1002/adem.200300567 10.1016/S0925-8388(96)02699-0 10.1111/jace.14756 10.1039/D1TC03287A 10.1557/mrc.2018.184 10.1016/j.jallcom.2017.02.070 10.1016/j.jeurceramsoc.2016.09.018 10.1039/C6TA03249D 10.1002/pssr.201600043 10.1038/ncomms9485 10.1016/j.jeurceramsoc.2020.12.021 10.1063/5.0003149 10.1107/S0021889813003531 |
| ContentType | Journal Article |
| Copyright | 2023 Elsevier B.V. |
| Copyright_xml | – notice: 2023 Elsevier B.V. |
| DBID | AAYXX CITATION |
| DOI | 10.1016/j.matlet.2023.133955 |
| DatabaseName | CrossRef |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering Physics |
| EISSN | 1873-4979 |
| ExternalDocumentID | 10_1016_j_matlet_2023_133955 S0167577X23001404 |
| GroupedDBID | --K --M -~X .~1 0R~ 1B1 1~. 1~5 4.4 457 4G. 5GY 5VS 7-5 71M 8P~ 9JN AABNK AABXZ AACTN AAEDT AAEDW AAEPC AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AAXUO ABFNM ABJNI ABMAC ABXRA ABYKQ ACDAQ ACGFS ACIWK ACRLP ADBBV ADEZE AEBSH AEKER AENEX AEZYN AFKWA AFRZQ AFTJW AGHFR AGUBO AGYEJ AHHHB AIEXJ AIKHN AITUG AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ AXJTR BKOJK BLXMC CS3 EBS EFJIC EFLBG EO8 EO9 EP2 EP3 F5P FDB FIRID FNPLU FYGXN G-Q GBLVA IHE J1W KOM M24 M41 MAGPM MO0 N9A O-L O9- OAUVE OZT P-8 P-9 P2P PC. Q38 RNS ROL RPZ SDF SDG SDP SES SEW SPC SPCBC SPD SSM SSZ T5K XPP ZMT ~02 ~G- 29M AAXKI AAYXX ABXDB ACNNM AFJKZ AKRWK ASPBG AVWKF AZFZN CITATION EJD FEDTE FGOYB G-2 HVGLF HZ~ R2- RIG SMS WUQ |
| ID | FETCH-LOGICAL-c236t-88f53ea35491d0b7521759302ceabb3a86b4d597d43094ca0e1dc9b4ea37f4f33 |
| ISSN | 0167-577X |
| IngestDate | Thu Sep 26 17:06:19 EDT 2024 Fri Feb 23 02:38:56 EST 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Keywords | Chemical vapor deposition High-entropy oxide Thin film |
| Language | English |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-c236t-88f53ea35491d0b7521759302ceabb3a86b4d597d43094ca0e1dc9b4ea37f4f33 |
| ORCID | 0000-0002-8536-1205 0000-0003-1590-7732 0000-0002-5142-9021 |
| ParticipantIDs | crossref_primary_10_1016_j_matlet_2023_133955 elsevier_sciencedirect_doi_10_1016_j_matlet_2023_133955 |
| PublicationCentury | 2000 |
| PublicationDate | 2023-04-15 |
| PublicationDateYYYYMMDD | 2023-04-15 |
| PublicationDate_xml | – month: 04 year: 2023 text: 2023-04-15 day: 15 |
| PublicationDecade | 2020 |
| PublicationTitle | Materials letters |
| PublicationYear | 2023 |
| Publisher | Elsevier B.V |
| Publisher_xml | – name: Elsevier B.V |
| References | Bérardan, Meena, Franger, Herrero, Dragoe (b0085) 2017; 704 Jimenez-Segura, Takayama, Bérardan, Hoser, Reehuis, Takagi, Dragoe (b0035) 2019; 114 Sharma, Musico, Gao, Hua, May, Herklotz, Rastogi, Mandrus, Yan, Lee, Chisholm, Keppens, Ward (b0040) 2018; 2 Rost, Sachet, Borman, Moballegh, Dickey, Hou, Jones, Curtarolo, Maria (b0015) 2015; 6 Bérardan, Franger, Meena, Dragoe (b0025) 2016; 4 Jacobson, Diercks, To, Zakutayev, Brennecka (b0060) 2021; 41 Chen, Prud’homme, Wang, Ribot, Ji (b0075) 2013; 218 Bérardan, Franger, Dragoe, Meena, Dragoe (b0030) 2016; 10 Yeh, Chen, Lin, Gan, Chin, Shun, Tsau, Chang (b0010) 2004; 6 Sénateur, Felten, Pignard, Weiss, Abrutis, Bigelyte, Teiserskis, Saltyte, Vengalis (b0065) 1997; 251 Kotsonis, Rost, Harris, Maria (b0050) 2018; 8 Rost, Rak, Brenner, Maria (b0090) 2017; 100 Braun, Rost, Lim, Giri, Olson, Kotsonis, Stan, Brenner, Maria, Hopkins (b0045) 2018; 30 Navrotsky, Kleppa (b0005) 1967; 29 Deschanvres, Jimenez, Rapenne, McSporran, Servet, Durand, Modreanu (b0070) 2008; 516 Mnasri, Bérardan, Tusseau-Nenez, Gacoin, Maurin, Dragoe (b0100) 2021; 9 Toby, Von Dreele (b0080) 1st 2013.; 46 Sarkar, Djenadic, Usharani, Sanghvi, Chakravadhanula, Gandhi, Hahn, Bhattacharya (b0095) 1st 2017.; 37 Musicó, Gilbert, Ward, Page, George, Yan, Mandrus, Keppens (b0020) 2020; 8 Meisenheimer, Kratofil, Heron (b0055) 2017; 7 Meisenheimer (10.1016/j.matlet.2023.133955_b0055) 2017; 7 Deschanvres (10.1016/j.matlet.2023.133955_b0070) 2008; 516 Bérardan (10.1016/j.matlet.2023.133955_b0030) 2016; 10 Sénateur (10.1016/j.matlet.2023.133955_b0065) 1997; 251 Mnasri (10.1016/j.matlet.2023.133955_b0100) 2021; 9 Kotsonis (10.1016/j.matlet.2023.133955_b0050) 2018; 8 Chen (10.1016/j.matlet.2023.133955_b0075) 2013; 218 Bérardan (10.1016/j.matlet.2023.133955_b0085) 2017; 704 Musicó (10.1016/j.matlet.2023.133955_b0020) 2020; 8 Navrotsky (10.1016/j.matlet.2023.133955_b0005) 1967; 29 Braun (10.1016/j.matlet.2023.133955_b0045) 2018; 30 Bérardan (10.1016/j.matlet.2023.133955_b0025) 2016; 4 Jacobson (10.1016/j.matlet.2023.133955_b0060) 2021; 41 Yeh (10.1016/j.matlet.2023.133955_b0010) 2004; 6 Rost (10.1016/j.matlet.2023.133955_b0090) 2017; 100 Jimenez-Segura (10.1016/j.matlet.2023.133955_b0035) 2019; 114 Sharma (10.1016/j.matlet.2023.133955_b0040) 2018; 2 Toby (10.1016/j.matlet.2023.133955_b0080) 2013; 46 Rost (10.1016/j.matlet.2023.133955_b0015) 2015; 6 Sarkar (10.1016/j.matlet.2023.133955_b0095) 2017; 37 |
| References_xml | – volume: 8 year: 2020 ident: b0020 publication-title: APL Mater. contributor: fullname: Keppens – volume: 7 start-page: 13344 year: 2017 ident: b0055 publication-title: Sci. Rep. contributor: fullname: Heron – volume: 29 start-page: 2701 year: 1967 end-page: 2714 ident: b0005 publication-title: J. Inorg. Nucl. Chem. contributor: fullname: Kleppa – volume: 6 start-page: 299 year: 2004 end-page: 303 ident: b0010 publication-title: Adv. Eng. Mater. contributor: fullname: Chang – volume: 100 start-page: 2732 year: 2017 end-page: 2738 ident: b0090 publication-title: J. Am. Ceram. Soc. contributor: fullname: Maria – volume: 251 start-page: 288 year: 1997 end-page: 291 ident: b0065 publication-title: J. Alloy. Compd. contributor: fullname: Vengalis – volume: 2 year: 2018 ident: b0040 publication-title: Phys. Rev. Mater. contributor: fullname: Ward – volume: 704 start-page: 693 year: 2017 end-page: 700 ident: b0085 publication-title: J. Alloy. Compd. contributor: fullname: Dragoe – volume: 10 start-page: 328 year: 2016 end-page: 333 ident: b0030 publication-title: Phys. Status Solidi (RRL) – Rapid Res. Lett. contributor: fullname: Dragoe – volume: 516 start-page: 1461 year: 2008 end-page: 1463 ident: b0070 publication-title: Thin Solid Films contributor: fullname: Modreanu – volume: 4 start-page: 9536 year: 2016 end-page: 9541 ident: b0025 publication-title: J. Mater. Chem. A contributor: fullname: Dragoe – volume: 46 start-page: 544 year: 1st 2013. end-page: 549 ident: b0080 publication-title: J. Appl. Cryst. contributor: fullname: Von Dreele – volume: 114 start-page: pp year: 2019 ident: b0035 publication-title: Appl. Phys. Lett. contributor: fullname: Dragoe – volume: 37 start-page: 747 year: 1st 2017. end-page: 754 ident: b0095 publication-title: J. Eur. Ceram. Soc. contributor: fullname: Bhattacharya – volume: 41 start-page: 2617 year: 2021 end-page: 2624 ident: b0060 publication-title: J. Eur. Ceram. Soc. contributor: fullname: Brennecka – volume: 8 start-page: 1371 year: 2018 end-page: 1377 ident: b0050 publication-title: MRS Commun. contributor: fullname: Maria – volume: 218 start-page: 7 year: 2013 end-page: 16 ident: b0075 publication-title: Surf. Coat. Technol. contributor: fullname: Ji – volume: 9 start-page: 15121 year: 2021 end-page: 15131 ident: b0100 publication-title: J. Mater. Chem. C contributor: fullname: Dragoe – volume: 6 start-page: 8485 year: 2015 ident: b0015 publication-title: Nat. Commun. contributor: fullname: Maria – volume: 30 start-page: 1805004 year: 2018 ident: b0045 publication-title: Adv. Mater. contributor: fullname: Hopkins – volume: 29 start-page: 2701 issue: 11 year: 1967 ident: 10.1016/j.matlet.2023.133955_b0005 publication-title: J. Inorg. Nucl. Chem. doi: 10.1016/0022-1902(67)80008-3 contributor: fullname: Navrotsky – volume: 114 start-page: pp issue: 12 year: 2019 ident: 10.1016/j.matlet.2023.133955_b0035 publication-title: Appl. Phys. Lett. doi: 10.1063/1.5091787 contributor: fullname: Jimenez-Segura – volume: 30 start-page: 1805004 issue: 51 year: 2018 ident: 10.1016/j.matlet.2023.133955_b0045 publication-title: Adv. Mater. doi: 10.1002/adma.201805004 contributor: fullname: Braun – volume: 7 start-page: 13344 issue: 1 year: 2017 ident: 10.1016/j.matlet.2023.133955_b0055 publication-title: Sci. Rep. doi: 10.1038/s41598-017-13810-5 contributor: fullname: Meisenheimer – volume: 218 start-page: 7 year: 2013 ident: 10.1016/j.matlet.2023.133955_b0075 publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2012.12.017 contributor: fullname: Chen – volume: 516 start-page: 1461 issue: 7 year: 2008 ident: 10.1016/j.matlet.2023.133955_b0070 publication-title: Thin Solid Films doi: 10.1016/j.tsf.2007.03.089 contributor: fullname: Deschanvres – volume: 6 start-page: 299 issue: 5 year: 2004 ident: 10.1016/j.matlet.2023.133955_b0010 publication-title: Adv. Eng. Mater. doi: 10.1002/adem.200300567 contributor: fullname: Yeh – volume: 251 start-page: 288 issue: 1–2 year: 1997 ident: 10.1016/j.matlet.2023.133955_b0065 publication-title: J. Alloy. Compd. doi: 10.1016/S0925-8388(96)02699-0 contributor: fullname: Sénateur – volume: 100 start-page: 2732 issue: 6 year: 2017 ident: 10.1016/j.matlet.2023.133955_b0090 publication-title: J. Am. Ceram. Soc. doi: 10.1111/jace.14756 contributor: fullname: Rost – volume: 2 issue: 6 year: 2018 ident: 10.1016/j.matlet.2023.133955_b0040 publication-title: Phys. Rev. Mater. contributor: fullname: Sharma – volume: 9 start-page: 15121 year: 2021 ident: 10.1016/j.matlet.2023.133955_b0100 publication-title: J. Mater. Chem. C doi: 10.1039/D1TC03287A contributor: fullname: Mnasri – volume: 8 start-page: 1371 issue: 3 year: 2018 ident: 10.1016/j.matlet.2023.133955_b0050 publication-title: MRS Commun. doi: 10.1557/mrc.2018.184 contributor: fullname: Kotsonis – volume: 704 start-page: 693 year: 2017 ident: 10.1016/j.matlet.2023.133955_b0085 publication-title: J. Alloy. Compd. doi: 10.1016/j.jallcom.2017.02.070 contributor: fullname: Bérardan – volume: 37 start-page: 747 issue: 2 year: 2017 ident: 10.1016/j.matlet.2023.133955_b0095 publication-title: J. Eur. Ceram. Soc. doi: 10.1016/j.jeurceramsoc.2016.09.018 contributor: fullname: Sarkar – volume: 4 start-page: 9536 issue: 24 year: 2016 ident: 10.1016/j.matlet.2023.133955_b0025 publication-title: J. Mater. Chem. A doi: 10.1039/C6TA03249D contributor: fullname: Bérardan – volume: 10 start-page: 328 issue: 4 year: 2016 ident: 10.1016/j.matlet.2023.133955_b0030 publication-title: Phys. Status Solidi (RRL) – Rapid Res. Lett. doi: 10.1002/pssr.201600043 contributor: fullname: Bérardan – volume: 6 start-page: 8485 issue: 1 year: 2015 ident: 10.1016/j.matlet.2023.133955_b0015 publication-title: Nat. Commun. doi: 10.1038/ncomms9485 contributor: fullname: Rost – volume: 41 start-page: 2617 issue: 4 year: 2021 ident: 10.1016/j.matlet.2023.133955_b0060 publication-title: J. Eur. Ceram. Soc. doi: 10.1016/j.jeurceramsoc.2020.12.021 contributor: fullname: Jacobson – volume: 8 issue: 4 year: 2020 ident: 10.1016/j.matlet.2023.133955_b0020 publication-title: APL Mater. doi: 10.1063/5.0003149 contributor: fullname: Musicó – volume: 46 start-page: 544 issue: 2 year: 2013 ident: 10.1016/j.matlet.2023.133955_b0080 publication-title: J. Appl. Cryst. doi: 10.1107/S0021889813003531 contributor: fullname: Toby |
| SSID | ssj0004904 |
| Score | 2.4367642 |
| Snippet | •High-entropy oxide (MgCONiCuZn)O synthesized by CVD.•The entropy-stabilized phase is obtained after annealing at 950 °C.•The lattice parameters are close to... |
| SourceID | crossref elsevier |
| SourceType | Aggregation Database Publisher |
| StartPage | 133955 |
| SubjectTerms | Chemical vapor deposition High-entropy oxide Thin film |
| Title | Chemical vapor deposition of entropy-stabilized rock-salt type oxide thin films |
| URI | https://dx.doi.org/10.1016/j.matlet.2023.133955 |
| Volume | 337 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://sdu.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1baxQxFA62RagPorXFeiMPfZMs00lmM3lc7Er1oQptcd-GTC7t1nWm7M6K-us9ZzI3XBEV-jIsgWxIzsfJd64h5EgZ7blwimmDYcY41UzDvcbU2CvvNFyZBv0dp-fybJaeTMW0D7T3Y3cqaRgDWWPl7D9Iu_tTGIDfIHP4gtTh-1dy7zoAfNVArTHTtUnLQlqIrtzy9jsDSohJsT-AbcIF9pmt9KIK3tjy29w6YKPzAls2Na3M2xefdBV28HpRFwH1afJ63hRuTYqqHETqPy7XsH95XX4Jj7Gfoad-Me_jQY23-tO6I9RLfRWyE08AuHrolIg5xldCWWbwlG1UywTnJSjlRMpZuHuCwk0lx1fu1FAj89AHZkO7B0fDzQi4POxzhAuPwMZWodHvL32zz3E5XA2MrLqJ0BbZiUEbgTLcmbybzt735bMq6lrA44S2wrJOA9xc6_cMZsBKLh6Rh405QScBB4_JPVfskQeDJpN75H6d5GtWT8iHFhu0xgbtsUFLTzexQTtsUMQGrbFBERu0xsY-uXw7vXhzypoHNZiJ-bhiaeoT7jRPhDq2US6BuslE8Sg2Tuc51-k4FxYsTCs4WP1GR-7YGpULmCK98JwfkO2iLNxTQsdohworRP3imQEzI3Fx5BNtjbbSu0PC2kPKbkPflKxNKLzJwqFmeKhZONRDItuTzBruFzhdBsL_48xn_z3zOdntsfuCbFfLtXtJtlZ2_aqByE_V6n7d |
| link.rule.ids | 315,782,786,27933,27934 |
| linkProvider | Elsevier |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Chemical+vapor+deposition+of+entropy-stabilized+rock-salt+type+oxide+thin+films&rft.jtitle=Materials+letters&rft.au=Raison%2C+Antoine&rft.au=Prud%27homme%2C+Nathalie&rft.au=Wang%2C+Wu&rft.au=Dragoe%2C+Diana&rft.date=2023-04-15&rft.pub=Elsevier+B.V&rft.issn=0167-577X&rft.eissn=1873-4979&rft.volume=337&rft_id=info:doi/10.1016%2Fj.matlet.2023.133955&rft.externalDocID=S0167577X23001404 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0167-577X&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0167-577X&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0167-577X&client=summon |