Enhanced dielectric and piezoelectric properties of low-temperature processed Pb(Zr,Ti)O₃ thick films prepared by hybrid deposition technique with chemical solution infiltration process

High quality PZT thick films over 10μm were successfully prepared using a chemical solution infiltration into the porous screen-printed PZT thick films. The hybrid films prepared with solution infiltration process showed very dense and uniform microstructure with large grain size at a low annealing...

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Bibliographic Details

Published in:	Materials letters Vol. 65; no. 19-20; pp. 3041 - 3043
Main Authors:	Kim, Seung-Hyun, Koo, Chang Young, Lee, Jinkee, Jiang, Wenyan, Kingon, Angus I
Format:	Journal Article
Language:	English
Published:	Elsevier B.V 01-10-2011
Subjects:	annealing Deposition Dielectric constant Electrical properties Grain size Infiltration lead Lead zirconate titanates microstructure ozone Piezoelectricity temperature Thick films
Online Access:	Get full text
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