Optimization of light-valve mirrors
— A mirror structure for reflective Si‐based light valves was fabricated using chemical‐mechanical polishing and a thin 150‐nm Al(Cu)/Ti mirror to minimize hillock formation. The use of chemical‐mechanical polishing planarization resulted in only a 1% loss in reflectivity from topography under the m...
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| Published in: | Journal of the Society for Information Display Vol. 6; no. 4; pp. 247 - 251 |
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| Main Authors: | , , , , , , , , |
| Format: | Journal Article Conference Proceeding |
| Language: | English |
| Published: |
Oxford, UK
Blackwell Publishing Ltd
01-12-1998
Society for Information Display |
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| Abstract | — A mirror structure for reflective Si‐based light valves was fabricated using chemical‐mechanical polishing and a thin 150‐nm Al(Cu)/Ti mirror to minimize hillock formation. The use of chemical‐mechanical polishing planarization resulted in only a 1% loss in reflectivity from topography under the mirrors. The reflectivity for pixel sizes from 7.5 to 40 μm and 0.7‐ or 0.5‐μ.m gaps were measured, and the performance of TN LC pixels with different sizes and inversion methods are reported. |
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| AbstractList | — A mirror structure for reflective Si‐based light valves was fabricated using chemical‐mechanical polishing and a thin 150‐nm Al(Cu)/Ti mirror to minimize hillock formation. The use of chemical‐mechanical polishing planarization resulted in only a 1% loss in reflectivity from topography under the mirrors. The reflectivity for pixel sizes from 7.5 to 40 μm and 0.7‐ or 0.5‐μ.m gaps were measured, and the performance of TN LC pixels with different sizes and inversion methods are reported. Abstract— A mirror structure for reflective Si‐based light valves was fabricated using chemical‐mechanical polishing and a thin 150‐nm Al(Cu)/Ti mirror to minimize hillock formation. The use of chemical‐mechanical polishing planarization resulted in only a 1% loss in reflectivity from topography under the mirrors. The reflectivity for pixel sizes from 7.5 to 40 μm and 0.7‐ or 0.5‐μ.m gaps were measured, and the performance of TN LC pixels with different sizes and inversion methods are reported. |
| Author | Colgan, E. G. Yang, K.-H. Doany, F. Uda, M. Tomooka, T. Rosenbluth, A. Shinohara, M. Lu, M. Tsukamoto, T. |
| Author_xml | – sequence: 1 givenname: E. G. surname: Colgan fullname: Colgan, E. G. email: ecolgan@us.ibm.com organization: IBM T. J. Watson Research Center, P.O. Box 218, 10-204, Yorktown Heights, NY 10598 – sequence: 2 givenname: F. surname: Doany fullname: Doany, F. organization: IBM T. J. Watson Research Center, P.O. Box 218, 10-204, Yorktown Heights, NY 10598 – sequence: 3 givenname: M. surname: Lu fullname: Lu, M. organization: IBM T. J. Watson Research Center, P.O. Box 218, 10-204, Yorktown Heights, NY 10598 – sequence: 4 givenname: A. surname: Rosenbluth fullname: Rosenbluth, A. organization: IBM T. J. Watson Research Center, P.O. Box 218, 10-204, Yorktown Heights, NY 10598 – sequence: 5 givenname: K.-H. surname: Yang fullname: Yang, K.-H. organization: IBM T. J. Watson Research Center, P.O. Box 218, 10-204, Yorktown Heights, NY 10598 – sequence: 6 givenname: M. surname: Uda fullname: Uda, M. organization: IBM Microelectronics Division, Yasu, Japan – sequence: 7 givenname: M. surname: Shinohara fullname: Shinohara, M. organization: IBM Microelectronics Division, Yasu, Japan – sequence: 8 givenname: T. surname: Tomooka fullname: Tomooka, T. organization: IBM Display Business Unit, Yasu, Japan – sequence: 9 givenname: T. surname: Tsukamoto fullname: Tsukamoto, T. organization: IBM Display Business Unit, Yasu, Japan |
| BackLink | http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=1789925$$DView record in Pascal Francis |
| BookMark | eNp1j0tPAjEYRRuDiYAu_AckunEx2Md02i4NKEKIxFdYNt90Wq0ODGknKP56xwzRlat7F-fc5PZQZ12tLUKnBA-JlOqSDImSnKbqAHWJYjJhGRedpmNBEqwoPUK9GN8wphlPsy46W2xqv_JfUPtqPajcoPQvr3WyhXJrBysfQhXiMTp0UEZ7ss8-er65fhrdJvPFZDq6mieGYokTIIVjzLhC2MyJlDvJTeFyjk2WSqHyDAhYV6TCGQDgmOdCpIIS6fJc5BRYH120uyZUMQbr9Cb4FYSdJlj_vNNE79817HnLbiAaKF2AtfHxTxBSKcobbNhiH760u__39OxxOmYMN0LSCj7W9vNXgPCuM8EE18u7iSbj2f3yYTTRS_YN34ZtTg |
| Cites_doi | 10.1016/0040-6090(92)90539-N 10.1147/rd.423.0347 10.1147/rd.423.0321 |
| ContentType | Journal Article Conference Proceeding |
| Copyright | 1998 Society for Information Display 1999 INIST-CNRS |
| Copyright_xml | – notice: 1998 Society for Information Display – notice: 1999 INIST-CNRS |
| DBID | BSCLL IQODW AAYXX CITATION |
| DOI | 10.1889/1.1985249 |
| DatabaseName | Istex Pascal-Francis CrossRef |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | CrossRef |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering Applied Sciences Physics |
| EISSN | 1938-3657 |
| EndPage | 251 |
| ExternalDocumentID | 10_1889_1_1985249 1789925 JSID330 ark_67375_WNG_1DJQWRCG_W |
| Genre | article |
| GroupedDBID | 05W 0R~ 1OB 1OC 29L 31~ 33P 3SF 50Y 52U 5GY 8-0 8-1 A00 AAESR AAEVG AAHHS AANLZ AAONW AASGY AAXRX AAZKR ABCUV ABDPE ABJNI ACAHQ ACBWZ ACCFJ ACCZN ACGFS ACPOU ACXBN ACXQS ADBBV ADEOM ADIZJ ADKYN ADMGS ADOZA ADXAS ADZMN AEEZP AEIGN AEIMD AENEX AEQDE AEUYR AFBPY AFFPM AFGKR AFPWT AHBTC AI. AITYG AIURR AIWBW AJBDE AJXKR ALMA_UNASSIGNED_HOLDINGS ALUQN AMBMR AMYDB ASPBG ATUGU AUFTA AVWKF AZFZN AZVAB BDRZF BFHJK BHBCM BMNLL BMXJE BNHUX BOGZA BRXPI BSCLL CMOOK CS3 DCZOG DPXWK DRFUL DRSTM DU5 EBS EJD F5P FEDTE G-S GODZA HGLYW HSZ HVGLF HZ~ I-F LATKE LEEKS LITHE LOXES LUTES LYRES MEWTI MRFUL MRSTM MSFUL MSSTM MXFUL MXSTM MY~ O66 O9- P2W PALCI PQQKQ R.K RIWAO RJQFR ROL SAMSI SJN SUPJJ VH1 WBKPD WIH WIK WLBEL WOHZO WXSBR WYISQ WYJ ZE2 ZZTAW G8K ABHUG ACXME ADAWD ADDAD AEUQT AFVGU AGJLS IQODW AAMNL AAYXX CITATION |
| ID | FETCH-LOGICAL-c2080-a1df33cfd7e6f745f85cdfb50c64879b6a1aefd47fcaaa505b7747218fbb7b2a3 |
| IEDL.DBID | 33P |
| ISSN | 1071-0922 |
| IngestDate | Thu Nov 21 21:05:07 EST 2024 Sun Oct 22 16:05:14 EDT 2023 Sat Aug 24 00:54:53 EDT 2024 Wed Oct 30 09:50:39 EDT 2024 |
| IsPeerReviewed | false |
| IsScholarly | true |
| Issue | 4 |
| Keywords | Reflectivity Optical valve Planarization Reflected light Polishing Experimental study Mirror Pixel |
| Language | English |
| License | CC BY 4.0 |
| LinkModel | DirectLink |
| MeetingName | 1998 SID International Symposium |
| MergedId | FETCHMERGED-LOGICAL-c2080-a1df33cfd7e6f745f85cdfb50c64879b6a1aefd47fcaaa505b7747218fbb7b2a3 |
| Notes | ark:/67375/WNG-1DJQWRCG-W istex:3649C9AF1B0FF5E1C09A5331C93DA09978A5D0F1 ArticleID:JSID330 Member, SID. |
| PageCount | 5 |
| ParticipantIDs | crossref_primary_10_1889_1_1985249 pascalfrancis_primary_1789925 wiley_primary_10_1889_1_1985249_JSID330 istex_primary_ark_67375_WNG_1DJQWRCG_W |
| PublicationCentury | 1900 |
| PublicationDate | December 1998 |
| PublicationDateYYYYMMDD | 1998-12-01 |
| PublicationDate_xml | – month: 12 year: 1998 text: December 1998 |
| PublicationDecade | 1990 |
| PublicationPlace | Oxford, UK |
| PublicationPlace_xml | – name: Oxford, UK – name: Playa del Rey, CA |
| PublicationTitle | Journal of the Society for Information Display |
| PublicationYear | 1998 |
| Publisher | Blackwell Publishing Ltd Society for Information Display |
| Publisher_xml | – name: Blackwell Publishing Ltd – name: Society for Information Display |
| References | H. Landis, P. Burke, W. Cote, et al, "Integration of chemical-mechanical polishing into CMOS integrated circuit manufacturing," Thin Solid Films 220, 1 (1992). J. L. Sanford, E. S. Schlig, T. Tomooka, et al, "Silicon light-valve array chip for high-resolution reflective liquid crystal projection displays," IBM J Res Develop 42(3/4), 347-358 (1998). R. L. Melcher, P. M. Alt, D. B. Dove, et al, "Design and fabrication of a prototype projection data monitor with high information content," IBM J Res Develop 42 (3/4), 321-338(1998). J. Bowron and T. Schmidt, "A high resolution reflective light valve projector: ELECTROHOME DLV 1280," in press, SPIE 3296, M. H. Wu editor (1998). A. O'Hara, I. Underwood, and D. G. Vass, "Planarisation of spatial light modulator silicon backplanes using chemical-mechanical polishing," IEE Colloquium on Microengineering and Optics, Digest 1994 043, 5/1-6 (1994). 1998 1997 1994; 1994 1992; 220 1998; 42 1991 e_1_2_1_7_1 e_1_2_1_8_1 e_1_2_1_6_1 e_1_2_1_3_1 e_1_2_1_4_1 O'Hara A. (e_1_2_1_10_1) 1994; 1994 e_1_2_1_2_1 Bowron J. (e_1_2_1_5_1) 1998 e_1_2_1_9_1 |
| References_xml | – year: 1997 – volume: 220 start-page: 1 year: 1992 article-title: “Integration of chemical‐mechanical polishing into CMOS integrated circuit manufacturing,” publication-title: Thin Solid Films – year: 1991 – volume: 42 start-page: 347 issue: 3/4 year: 1998 end-page: 358 article-title: “Silicon light‐valve array chip for high‐resolution reflective liquid crystal projection displays,” publication-title: IBM J Res Develop – volume: 42 start-page: 321 issue: 3/4 year: 1998 end-page: 338 article-title: “Design and fabrication of a prototype projection data monitor with high information content,” publication-title: IBM J Res Develop – volume: 1994 start-page: 5/1 issue: 043 year: 1994 end-page: 6 article-title: “Planarisation of spatial light modulator silicon backplanes using chemical‐mechanical polishing,” publication-title: IEE Colloquium on Microengineering and Optics – year: 1998 – ident: e_1_2_1_2_1 – volume-title: “A high resolution reflective light valve projector: ELECTROHOME DLV 1280,” year: 1998 ident: e_1_2_1_5_1 contributor: fullname: Bowron J. – ident: e_1_2_1_7_1 doi: 10.1016/0040-6090(92)90539-N – ident: e_1_2_1_8_1 doi: 10.1147/rd.423.0347 – ident: e_1_2_1_6_1 – volume: 1994 start-page: 5/1 issue: 043 year: 1994 ident: e_1_2_1_10_1 article-title: “Planarisation of spatial light modulator silicon backplanes using chemical‐mechanical polishing,” publication-title: IEE Colloquium on Microengineering and Optics contributor: fullname: O'Hara A. – ident: e_1_2_1_9_1 – ident: e_1_2_1_3_1 doi: 10.1147/rd.423.0321 – ident: e_1_2_1_4_1 |
| SSID | ssj0026546 |
| Score | 1.513391 |
| Snippet | — A mirror structure for reflective Si‐based light valves was fabricated using chemical‐mechanical polishing and a thin 150‐nm Al(Cu)/Ti mirror to minimize... Abstract— A mirror structure for reflective Si‐based light valves was fabricated using chemical‐mechanical polishing and a thin 150‐nm Al(Cu)/Ti mirror to... |
| SourceID | crossref pascalfrancis wiley istex |
| SourceType | Aggregation Database Index Database Publisher |
| StartPage | 247 |
| SubjectTerms | Applied sciences Display Display devices, liquid-crystal devices Electronics Exact sciences and technology Fundamental areas of phenomenology (including applications) Liquid crystals liquid-crystal light valves Optical elements, devices, and systems Optical materials Optics Physics planarization Reflective light valves |
| Title | Optimization of light-valve mirrors |
| URI | https://api.istex.fr/ark:/67375/WNG-1DJQWRCG-W/fulltext.pdf https://onlinelibrary.wiley.com/doi/abs/10.1889%2F1.1985249 |
| Volume | 6 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://sdu.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpZ3JTsMwEIYtKBc4sCMCFEWI5RSIs9kRJ9SF0kNZCiq3yI5tCUFblFLEkUfgGXkSxk4a6AEJibudxKOxZ77I8w9C-y6NiWScOziU3AkEYQ4VceTEqfQJxOOAGQW-Vpd07mm9oWVyTie1MLk-RPnDTe8Mc17rDc543oWEUq2RiY-Bl0OgBzh_gRJM-YZ_VcJWUaQDdAO4HHteoSoEc0_KmVOxaE6b9U3fjWQjMI_K-1pM56wm6DSX_vW5y2ixyDXts9w5VtCMHKyihR8KhGvo4BKOjH5Ri2kPlf2kYf3z_QMc8FXa_YcsG2ajdXTXbNzWWk7ROcFJPUgBHYaF8v1UCSIjRYJQ0TAVioduGgGgxDximEklAqJSxhgkQRyyQGBBqjgn3GP-BqoMhgO5iewgwpQFlAcSwE0JSYFhhCskSZWvcCwstDexYfKcC2QkGixg1QlOijVb6NBYtxzBskd9o4yESa9znuB6-7p3UztPehaqTpn_-5EEwNALLXRkjPz7q5J296Lu--7Wn0duo3lTaGjuqOygyks2llU0OxLjXeNSX_H7y5s |
| link.rule.ids | 310,311,315,782,786,791,792,1408,23939,23940,25149,27933,27934,46064,46488 |
| linkProvider | Wiley-Blackwell |
| linkToHtml | http://sdu.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV3JTsMwEB1BewAO7IiyRojlFGhWOxIXRAtlK7vKzbJjW0LQFqUUceQT-Ea-hLEbCj0gIXG34_hpxjPPmnkGWC_ThCguhOtFSrihJNylMondJFUBwXgccqvAV7sm9TtaqRqZnN2vXpiePkT_ws14hj2vjYObC2nr5ZQakUxvGwlzhPRhGIphjIZoGjiCiz7dytt0kN8gYU58P9cVwsk7_akD0ahogH011ZG8gwDp3ssWg1mrDTsHE__74UkYz9NNZ69nH1MwpFrTMPZDhHAGNs7x1Gjm7ZhOWzuPhq9_vL2jDb4op3mfZe2sMwu3B9Wb_ZqbP57gpj5mgS73pA6CVEuiYk3CSNMolVpE5RShIomIuceVliHRKecc8yCBiSDSQaqFIMLnwRwUWu2WmgcnjD3KQypChdxNS0WRxsiyVCTVgfYSWYK1LxDZU08jgxlugbtmHsv3XIJNC29_BM8eTFEZiVijfsi8yvFl42r_kDVKsDyA__cnCXJDPyrBlkX596XY8fVRJQjKC38euQojtZuzU3Z6VD9ZhFHbd2hLVpag8Jx11TIMd2R3xdrXJ-N3z8M |
| linkToPdf | http://sdu.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV3JTsMwEB1BkRAc2BFljRDLKdDESeyIE6KUVWVXuVl2bEsIaFFKEUc-gW_kSxi7odADEhJ3O4mfxp73oplngLUKS6kWUvpBrKUfKSp8ptLETzNNKObjSDgHvsMrWr9l1X1rk7Pz1QvT9Yfo_XCzO8Od13aDPynjNjlj1iMz2EK9HKN6GIShCGm4Nc4n5LyntoouHZQ3qJfTMCxshXDydm9qXzIasri-2uJI0UZ8TPdii37S6rJObfxf3zsBYwXZ9Ha70TEJA7o5BaM_LAinYf0Mz4zHohnTaxnvwar1j7d3jMAX7T3e5Xkrb8_ATW3_eu_QL65O8LMQOaAvAmUIyYyiOjE0ig2LM2VkXMkSVCipTEQgtFERNZkQAlmQRBqIYpAZKakMBZmFUrPV1HPgRUnARMRkpFG5GaUZihhVUZpmhpggVWVY_cKQP3UdMrhVFrhqHvBizWXYcOj2Roj83paU0Zg36gc8qB5fNC73DnijDEt98H8_kqIyDOMybDqQf38VP746qhJSmf_zyBUYPq_W-OlR_WQBRlzToatXWYTSc97RSzDYVp1lF12fg6rOaQ |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=proceeding&rft.title=Journal+of+the+Society+for+Information+Display&rft.atitle=Optimization+of+light-valve+mirrors&rft.au=COLGAN%2C+E.+G&rft.au=DOANY%2C+F&rft.au=LU%2C+M&rft.au=ROSENBLUTH%2C+A&rft.date=1998-12-01&rft.pub=Society+for+Information+Display&rft.issn=1071-0922&rft.eissn=1938-3657&rft.volume=6&rft.issue=4&rft.spage=247&rft.epage=251&rft_id=info:doi/10.1889%2F1.1985249&rft.externalDBID=n%2Fa&rft.externalDocID=1789925 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1071-0922&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1071-0922&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1071-0922&client=summon |